Title:
PLASMA GENERATOR
Document Type and Number:
WIPO Patent Application WO/2018/101126
Kind Code:
A1
Abstract:
Provided is a plasma generator that can adjust the plasma generation amount, with a simple structure. The plasma generator is provided with a control circuit that controls the frequency of alternating current power supplied to a piezoelectric transformer, and a control signal generating circuit that supplies a control signal to the control circuit, the plasma generator being configured so as to be able to appropriately adjust the control signal outputted from the control signal generating circuit. The control circuit controls the frequency of the alternating current power such that a detection value approaches a corresponding target value that is set on the basis of the control signal supplied from the control signal generating circuit.
Inventors:
SHIOHARA TAKAHIRO (JP)
KAMONO TAKESHI (JP)
KAMONO TAKESHI (JP)
Application Number:
PCT/JP2017/041842
Publication Date:
June 07, 2018
Filing Date:
November 21, 2017
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
H05H1/24; H01L41/107; H02M7/48
Foreign References:
| JP2002237394A | 2002-08-23 | |||
| JP2010277730A | 2010-12-09 | |||
| JP2001078442A | 2001-03-23 | |||
| JP2009129673A | 2009-06-11 | |||
| JPH04256280A | 1992-09-10 | |||
| JPH10337035A | 1998-12-18 |
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