Title:
PLASMA IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/176803
Kind Code:
A1
Abstract:
This plasma irradiation device comprises a plasma irradiator (2), an electric power supplier, and a gas supplier. The plasma irradiator (2) has: a case (10); a first lid body (20) having a first electrode and an irradiation hole (22); a second lid body (30) having a second electrode; an extension electrode that extends from the second lid body (30) toward the first lid body (20), the extension electrode connecting to the second electrode and being electrically isolated from the first electrode; a discharge portion that discharges electricity between the first electrode and the extension electrode; and a rectifying portion that causes the plasma generation gas to flow along the inner surface of the case (10), from the direction of the first electrode toward the direction of the second electrode.
Inventors:
MATSUO TATSUYA (JP)
MIYASATO KENICHIROU (JP)
MIYASATO KENICHIROU (JP)
Application Number:
PCT/JP2023/009748
Publication Date:
September 21, 2023
Filing Date:
March 14, 2023
Export Citation:
Assignee:
SEKISUI CHEMICAL CO LTD (JP)
International Classes:
H05H1/34
Foreign References:
| US20070196249A1 | 2007-08-23 | |||
| JP2008066058A | 2008-03-21 | |||
| US20080056961A1 | 2008-03-06 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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