MORIGUCHI, Theresa (Lam Research Corp Legal Dept, 4650 Cushing ParkwayFremont, CA, 94538, US)
HSU, Gean (Lam Research Corp Legal Dept, 4650 Cushing ParkwayFremont, CA, 94538, US)
MORIGUCHI, Theresa (Lam Research Corp Legal Dept, 4650 Cushing ParkwayFremont, CA, 94538, US)
13
CLAIMS
What is claimed is-
1 A method for generating plasma processing system component analysis software, comprising: defining component specifications for a plurality of components, each of said plurality of components implementing at least one of a user-interface function, a logic operation function, an input function, and an output function for analyzing a plasma processing system component, said defining including selecting said plurality of components from a component panel of a visual integrated design editor architecture (ViDEA), thereby causing said plurality of components to be disposed in a layout format in said VIDEA, and specifying properties of each of said plurality of components by performing at least one of selecting from predefined properties and defining parameters for said properties: and saving said plurality of components after said defining in a mark-up language configured to be executable by a browser without requiring prior compiling.
2 The method of claim 1 wherein said selecting of said plural ity of components from said component panel including dragging and dropping said plurality of components onto an integrated design editor.
3. The method of claim I. wherein said predefined properties for said plurality of components is defined by an external source
4 The method of claim 3 wherein said external source is a database.
5. The method of claim 3 wherein said external source is an external device.
6. The method of claim 1 wherein said mark-up language is an extensible mark-up language.
7 The method of claim 1 wherein said browser being a run-time loader. 8. An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured for generating plasma processing system component analysis software, comprising- computer-readable code for facilitating defining component specifications by a user for a plurality of components, each of said plurality of components implementing at least one 14 of a user-interface function, a logic operation function, an input function, and an output function for analyzing a plasma processing system component, said computer-readable code for facilitating defining component specifications including computer-readable code for selecting said plurality of components from a component pane! of a visual integrated design editor architecture (Vi DB Al, thereby causing said plurality of components to be disposed in a layout format in said VtDEA, and computer-readable code for specifying properties of each of said plurality of components by performing at least one of selecting from predefined properties and defining parameters for said properties; and computer-readable code for saving said plurality of components after said defining in a mark-up language configured to be executable by a browser without requiring prior compiling
9 The article of manufacturing of claim 8 wherein said computer-readable code for selecting of said plurality of components from said component panel including computer- readable code for dragging and dropping said plurality of components onto an integrated design editor.
10. The article of manufacturing of claim 8 wherein said predefined properties for said plurality of components is defined by an external source.
1 1. The article of manufacturing of claim 10 wherein said external source is a database,
12. The article of manufacturing of claim 10 wherein said external source is an external device.
S3 The article of manufacturing of claim 8 wherein said mark-up language is an extensible mark-up language.
14. The method of claim 8 wherein said browser being a run-tirπe loader.
15. An arrangement for generating plasma processing system component analysis software, comprising a plurality of components., each of said plurality of components implementing at least one of a user-interface function, a logic operation function, an input function, and an output function for defining component specifications, wherein said plurality of components is selectable from a component panel of a visual integrated design editor architecture (VlDEA), thereby causing said plurality 15 of components to be disposed in a layout format in said VlDKA after being selected, and wherein properties of each of said plurality of components are configurable by performing at least one of selecting from predefined properties and defining parameters for said properties; and a run-time loader, said run-time loader being configured to execute said plurality of components, said plurality of components being saved In a mark-up language configured to be executable by said run-time loader without requiring prior compiling. 16 The arrangement of claim 1 5 wherein said plurality of components is selectable from said component panel by dragging and dropping said plurality of components onto an integrated design editor.
17. The arrangement of claim 15 wherein said predefined properties for said plurality of components is defined by an external source.
18. The arrangement of claim 17 wherein said external source is a database.
19. The arrangement of claim 17 wherein said external source is an external device.
20. The arrangement of claim 15 wherein said mark-up language is an extensible mark-up language. |
1
PLASMA PROCESSING SYSTEM COMPONENT ANALYSIS SOFTWARE AND METHODS AND SYSTEMS FOR CREATING THE
SAME
BACKGROUND OF THE INVENTION
{Para 1] Advances in plasma processing have provided for growth in the semiconductor industry. As plasma processing continues to evolve, the needs for customized software applications to collect and analyze the data collected by the plasma processing system have also increased. As discussed herein, customized software application refers to software application that may be created to meet specific needs of an individual, a group, a department, a company, etc. jPara 2\ Customized software applications may be create for various reasons. For example, a customized software application may be created to simplify the task of collecting and/or retrieving information from a plasma processing system. Customized software application may also be created to provide procedural guidelines, such as ATAC test plans. In another example, customized software application may also be created to automate repetitive tasks.
[Para 3J Regardless of the reason for needing customized software applications, the task of creating customized software applications may be a complicated and complex task- that generally requires programming skills and knowledge that a non-programmer may not possess, In addition, the task of maintaining and updating the customized software application may also require programming skills and knowledge. Consequently, the task of creating, maintaining, and updating customized software application in a plasma processing environment may become an expensive and a time-consuming task. jPara 4f A method for creating customized software application may include having a software programmer employs a text editor to write software code Once the software code has been crafted, the software code may be compiled before an executable file may be generated. This method may be a time-consuming process that may require a software programmer to write code for both the design of the application and the function of the application, ϊrs an example, a simple form to collect data about a student may require a software programmer to write the code to design the physical format of the form and then write code to control the functionality and behavior of the form
2
{Para 5) Another method for generating customized software application in a plasma processing environment may be based on a.n integrated development environment (IDE) IDE or also known as design editor refers to software that may be employed to develop other software applications. IDE may include, but are not limited to, components for creating a graphical user interface (GUI), text code editor for creating and editing code, fools to aid in the construction of a graphical user interface (GlJlK a debugger, and a compiler. Examples of IDE include, but are not limited to Microsoft© Visual Studio, Borland® Delphi, and National Instrument™ Lab VIHW. WhSi IDH, the task of creating the program code for a software application may be simplified. In an example, instead of writing the code for the GUI and the functionality of a software application, an IDE may have components that a programmer may employ to simplify the task of creating the GUI, However, even with the IDiL, the creator of the software application still has to have the skill and knowledge to write the code that defines the functionality of GUI,
{Para 6| To facilitate discussion. Figure 1 shows a simple development cycle for developing customized software application in a plasma processing environment At a first step 102, a need for a customized software application may be identified. Consider the situation wherein, for example, testers may need a software application for creating test plans At a next step 104, a programmer may employ an IDE (e g., Microsoft© Visual Studio, Borland® Delphi, and National Instrument™ LabVIEW) to begin tlie process of creating the software application jPara 7j 4t a next step 106, the programmer may design the GUI for the software application. In an example, to create the GUI for a form, the programmer may add components (such as text box, list box, checkbox, etc) to the IDE to create the layout for the form j Para 8) At a next step 108, the programmer may write the code for the software application. The code may include, but are not limited to, defining load specifications, defining sequence for functionality, defining logic criteria, identify tables, and code for handling data entry,
[Para 9\ At a next step 1 10, the programmer may compile the code to identify potential bugs and to create an executable file
3
{Para 10] At a next step 1 12, the method may determine whether or not the code includes bugs Since the code is written by a programmer, the code may be susceptible to human errors (e g . bugs} in an example, if the programmer is creating a form for collecting data, the programmer may have to know the name of the tables and the table fields that may store the data collected by the form While writing the table information into the code, the programmer may misspell the table fields resulting in a potential bug in the code jPara HJ ϊf the code contains bugs, then at a next step 1 14, the method may provide a warning By receiving this warning, the piogrammer may have to debug the code and implement a fix before returning to a next step NO to compile the code again Steps 1 !0 thiough steps 1 14 may be iterative until all bugs base been identified
{Para 12] if no additional bugs are identified, then at a next step 1 16, an executable file may be created jPara 13] 4t a next step i 18. the customized software application may be distributed to end-users In an example, once the programmer has completed creating the software application for the testers, the customized software application may be deployed
[Para 14] The IDI; method of creating cu&tomi/ed software application may require skill and knowledge that a non-progiammer may not possess further, changes to the customized software application may require code changes and may require the code to be re-compiled In an example, a progiammer may not ha\e understood the requirement of the en.d-u.ser. thus, creating a software application that may require changes to be made to the software application To implement changes, new code may have to be written and the code may have to be re-compiled
BRtRF DESCRIPTION OF TBR DRAWINGS jPara 15] The present invention is illustrated by way of example, and not b\ way of limitation, in the figures of the accompanying drawings and in which like reference numerals refer to similar elements and in which-
[Para 16] figure 1 show s a simple development cycle for customized software applications jPara 17] Figure 2 shows, in an embodiment of the invention, a simple dc\ elopment cycle for a customized .software application using a VIDEA
4
{Para 18] Figure 3 shows, in an embodiment of the inventions, an example of a VϊDfiA UbOi interface jPara 19| Figure 4 shows, in an embodiment of the invention, an example of a VlDIA usei inteiface with a component in an editor
[Para 20] Figure 5 shows, in an embodiment of the invention, an example of how components ma> be defined within a VIDRA environment
{Para 2J] Figure 6 shows, in an embodiment of the invention, an example of an XML file
{Para 22] Figure 7 shows, in an embodiment of the invention, an example of a customized software application during iun-time
[Para 23] Figure S shows, in an embodiment of the invention, a block diagram illustrating flic overall VlDEA environment.
SUMMARY
I Para 24] The invention relates, in an embodiment, to a method foi generating plasma processing system component anaK sis software The method includes defining component specifications for a plurality of components Each of the plurality of components implements at least one of a user-interface function, a logic operation function, an input function, and an output function for analyzing a plasma processing system component Defining includes selecting the plurality of components from a component pane! of a visual integrated design editot architecture (VlDHA). thereby causing the plurality of components to be disposed in a layout format in the VIPF.λ Defining a! so includes specif) ing properties of each of the plurality of components by performing at least one of selecting from predefined properties and defining parameter for the properties The method also includes saving the plurality of components after the defining in a mark-up language configured to be executable b\ a browser without requiring prior compiling jPara 25] In another embodiment, the invention relates to an article of manufacture comprising a program storage medium basing computer readable code embodied therein The computer readable code is configured for generating plasma processing system component analysis softw are fhe article of manufacture includes computer-readable code
5 for facilitating defining component specifications by a user for a plurality of components Bach of the plurality of components implements at least one of a usei -interface function, a logic operation function, an input function, and an output function for analyzing a plasma processing system component The computer-readable code for facilitating defining component specifications includes computer-readable code for selecting the plurality of components from a component panel of a visual integrated design editor architecture (VIDFλ), theseby causing the plurality of components to be disposed in a layout format in the V I DP A I he computer-readable code for facilitating defi ning component specifications also includes computer-readable code for specifying properties of each of the plurality of components bv performing at least one of selecting from predefined properties and defining parameters for the properties The article of manufacture also includes computer-readable code for saving the plurality of components after the defining in a mark-up language configured to be executable by a browser without requiring prior compiling
I Para 26) In yet another embodiment, the im cntion relates to an airangement for gen ei a ting plasma processing svstem component analysis software The arrangement includes a plurality of components Each of the plurality of components implements at least one of a user-interface function, a logic operation function, an input function, and an output function for defining component specifications fhe plurality of components is selectable from a component panel of a visual integrated design editor architecture (VH)Hλ h thereby causing the plurality of components to be disposed in a layout format in the VIDHA after being selected The properties of each of the plurality of components are configurable by performing at least one of selecting from predefined properties and defining paiameteis for the properties The arrangement also includes a run-time loader The run-time loader is configured to execute the plurality of components, which is saved in a mark-up language configured to be executable bv the run-time loader without requiring prior compiling jPara 27J The above summary relates to only one of the many embodiments of the invention disclosed herein and is not intended to limit the scope of the invention, which is set forth in the claims herein These and other features of the present invention will be described in more detail below in the detailed description of the in\ ention and in conjunction with the following figures
6
DETAILED DESCRIPTION OF EMBODIMENTS
jPara 28] The present invention will now be described in detail with reference to a few embodiments thereof as illustrated in the accompanying drawings In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention It will be apparent, however, to one skilled in the art, that the present invention may be practiced without some or all of these specific details. In other instances, well known process steps and/or structures have not been described in detail in order to not unnecessarily obscure the present invention.
[Para 29| Various embodiments are described hereinbeiow, including methods and techniques. It should be kept in mind that the invention might aiso cover articles of manufacture that includes a computer readable medium on which computer-readable instructions for caπying out embodiments of the inventive technique are stored. The computer readable medium may include, for example, semiconductor, magnetic, op to- magnetic, optical, or other forms of computer readable medium for storing computer readable code. Further, the invention may also cover apparatuses for practicing embodiments of the invention Such apparatus may include circuits, dedicated and/or programmable, to carry out tasks pertaining to embodiments of the invention. Examples of such apparatus include a general-purpose computer and/or a dedicated computing device when appropriately programmed and may include a combination of a computer/computing device and dedicated/programmable circuits adapted for the various tasks pertaining to embodiments of the invention. jPara 3Oj In one aspect of the invention, the inventors herein realized that the process of creating, maintaining, and updating customized software applications may be simplified by providing a visual IDE environment Unlike the prior art, the inventors realized that the codes may have to be incorporated into a plurality of components that may be configurable to add or remove functionality fPara 31] In accordance with embodiments of the present invention, a visual integrated design editor architecture (VIDEA) is provided in which components and component properties may be manipulated to create a plasma processing system component analysis software. Embodiments of the invention a!so provide for the layout design of the component and the values of the component properties to be saved in a markup language, such as an
7 extensible markup language (XML) file. Embodiments of the invention further provide for the XML file to be implemented by a run-time loader, As discussed herein, a run-time loader refers to software that reads the file and executes the XML. jϊ*ara 321 in an embodiment of the invention, a VIDEA environment is provided in which a customized software application (e.g., plasma processing system component analysis software) may be created, maintained, and updated, hi an embodiment of the invention, a method is enabled for implementing a VlDEA. Consider the situation wherein, for example, a user wants to create a test plan software application. By employing the VlDEA, a user may create a plurality of layouts (e.g., test design layout, recipe design layout, etc.). In an example, the user may create the test design layout for the test plane software application In an embodiment, the user may create the layout by adding (e.g., dragging and dropping components onto an editor) a plurality of components (such as text box, list box, checkbox, etc.) to the IDE to create the layout.
[Para 33] Unlike the prior art, the user does not have to program the code for defining the components. With the VlDEA, a user may create executable customized software application without programming knowledge. In an embodiment, the user may define the component specifications (e.g., functionalities) By configuring each components, functionalities may include, but are not limited to, defining the physical features of a component, deOning load specifications, defining sequence for functionality, defining logic criteria, identify tables, and code for handling data entry. Since each configurable component may be associated with rules for defining the parameters, the task of debugging a program by a compiler may be eliminated. jPara 341 In yet another embodiment, the VlDEA may be able to configure the components by internalizing external data in an example, the VIDEA may access a plurality of databases and provide a list of fields from which the user may be able to select from, In another example, the VIDE A may access data stored on a tool. By incorporating externa! data, the VIDEA may provide the user with a dynamic method for accessing external data while configuring the components. Thus, the VLDEA may eliminate the need for the user to search for exteπial data.
[Para 35] Once the test design layout has been finalized, (he user may save the software application as an XML file, in an embodiment. Unlike the prior art, the file created by the
8
ViDhA does not require a compiler to debug the program and or create an executable Hie In an embodiment of the invention, a VTDFA environment may also prov ide a tun-time loader, which may be employed to execute the customized software application The run-time loader may read the XML file to construct a GUI interface for an end-user to utilize The run-time loader may be employed Io load a piuralitx of different software applications (e g , test design, report design, recipe design, configuration design, etc ) In an embodiment, the same layout data may be employed foj different purpose In an example, an XMi , file with a test design layout may be emploved to generate a test plan I he same XMl. file ma\ be employed to provide a report of the data collected by the test play
\ Para 36] The features and advantages of the ιn\ emion may be better undei stood with reference to the figures and discussions that follow
I Para 37] Figure 2 shows, in an embodiment of the invention, a simple development cycle for a customized .software application using a VIDCA Figures > - 7 will be discussed in tandem with Figure 2 to illustrate how the bteps in Figure 2 may be applied The example shown in Figures 3-7 is specific to an Automatic Test and Characterization (ATAC) framework jPara 38] At a first step 202, a need for a customized software application may be identified
I Para 391 At a next step 204, a user may employ a VIDLλ to begin the process of creating the software application In an embodiment, the user may be a programmer or a non-programmer jPara 40] Figure 3 shows, in an embodiment of the inventions, an example of a YϊDϋλ user interface In an embodiment, the V1DF.A may include an open-source designer host libran such as the one offered bv Microsoft^ I he MDhA may include an editor 302, a component box 304, and a properties box 306
[Para 41 ] At a next step 206, the user may design the GUI for the software application in an example, to create a GUI for a form, the programmer may add components {such as text box, list box, checkbox, etc ) to the IDE to create the layout for the form. j Para 42] Figure 4 shows, in an embodiment of the ins ention, an example of a YlDi LV usei interface with a component in an editor In an example, the user may begin creating a
9 customized software application by dragging component 408 (i.e., AtacComboBox) from a component box: 404 to an editor 402. jPara 43} At a next step 208, the user may configure each component by manipulating and/or selecting the properties {e.g., parameters K Figure 5 .shows, in an embodiment of the invention, an example of how components may be defined within a VlDEA environment An editor 502 may include a plurality of components dragged from a component box. 504. Sn an example, text boxes (520, 522, 524, and 526) are examples of AtacTextBox from component box 504 and labels (530, 532, 534, 536, 538, 540, 542, 544, and 546) are examples of AtaeLabel from component box 504. Once each component is placed on editor 502, each component may be moved around on editor 502 to create the desired layout for the GUI. j Para 44] For each of the components of the desired layout., the functionality for each component may be defined. In an example, the user may configure the properties in a properties box 506 for each of the components In an embodiment, the user may configure each component by selecting the properties from a predefined list (e.g., drop down list). Predefined list may be employed to minimize human errors Ce g., typographical errors) and frustration (e.g., being unable to remember the location of a table field). In another embodiment, the user may configure each component by manipulating the properties, such as by typing the parameters. The properties that may be configured may include, but are not limited to, a user-interface function, a logic operation function, an input function, and an output function
I Para 45] In an embodiment, a user-interface function of a component may be configured. Consider the situation wherein, for example, an ATAC test plan is being designed. Hie user may configure the different physical features of each of the components to create a design layout that is visually pleasing Physical features that may be manipulated may include, but are not limited to, font size, font color, background coior, text alignment, border color, and the like. jPara 46] In an embodiment the input/output function of a component may be configured. In an embodiment, the input/output function of a component may be associated with data from external sources Data from external sources may be derived from databases and/or external devices (e.g , gas box, processing module, etc. ) in an embodiment In a.n example, the user may select from a list of tables and/or a list of table fields (as seen in data
10 field list 55O) 5 thus, enabling the data input/output of a component to be associated with a table, in another example, the VlDEA may pull data about, a plasma processing system allowing the user to define the condition of a chamber for processing. By connecting to the externa) environment, the VIDEA may dynamically pull data from the external sources to provide the user with information which may assist in configuring the properties of the components.
I Para 47J In an embodiment, the logic operation function of a component may be configured. In an example, a logic operation function that may be defined is the sequence (e g., identifying the part being tested before pulling the test specification from the database) for performing an ATAC test plan. Iu another example, the criteria <e g., if»else condition, do- while loop, etc.) for executing a section of the ATAC test plan may be defined. In yet another example, code for handling data (e.g , data collected, data entered manually, data pulled from external sources, etc.) may be defined
[Para 481 At a next step 210, the layout design and component properties may be saved as an XML file This method does not require a compiler to debug the program and/or create an executable file. See Figure 6 for an example of an XML file. jPara 49] At a next step 212, the customized software application may be distributed to end-users. Figure 7 shows, in an embodiment of the invention, an example of a customized software application during run -time.
[Para 50] Since the MDEA may require no programming knowledge and may recμύre minimum training time, a user may easily employ VIDEA to create customized software application to meet everyday usage. In addition, changes and/or updates to a customized software application may be easily performed without requiring complicated programming changes and/or recompiling
[Para SJ ] Figure 8 shows, in an embodiment of {he invention, a block diagram illustrating the overall VIDEA environment. The overall VIDEA environment may be divided into two sections - a VIDEA section 8*X) and a run-time loader section 892. MDEA section 890 shows the block diagram related to creating, maintaining, and/or updating a customized software application. Run- time loader section 892 shows the block diagram related to running the customized software application.
11
{Para 52] VIDFA section 800 ma> include a V IDl: A 802, which may be activated to create customized software applications With VlDFA 802. a user may layout the design for a GUI by dragging and dropping components onto an editor The user may also configure the properties for each of the components to define the functionality of each component In an embodiment, the VIDPA may he connected to an external environment 810 to pull in database information 812 and/or data about external devices 814 (e g , plasma processing tools, appliances, electronic de\ ices, etc ) Once the layout of the GI l has been completed, the user ma\ sa\ e the information to create an XML, file In an example, a test design layout may be saved as an XMI. tile 804 In another example, a recipe design layout may be saved as an XML file 80(>
{Para 53] Run-time loader section 892 may include a run-time loader 820, which may read an XML tile (e g , 804 and'or 806) to reconstruct a GUI interface 822 for an end-user to utilize In an embodiment, the end-user may be the same peisoπ who created the customized user interface Run-time loader 820 ma> be employed to load different applications (e g , test design, report design, recipe design, configuration design, etc } In other words, run-time loader 820 may be employed to load any type of customized software applications as long as the customized software applications are saved in an XML format
{Para 541 in an embodiment, the same layout data may be employed for different purpose In othei ■ words, once GUI interface 822 has been reconstructed, the end-user may be offered the opportunity to determine how GUf interlace 822 may be employed Sn an example, XMI tile 804 with a test design layout may be employed to generate a test plan 832 that may provide guidance to an end-usci in testing a part and to collect and sloie test i exults. The same XML file S04 with a test design layout may be employed to provide a report 834 of the test plan and the data collected In addition, the same XMI. file 804 with a test design layout mas be employed to generate a PDF report 836 that may be saved and/or shared with other users In another example, XML tile 806 with a recipe design layout may be employed to generate a configuration file 842 which may be loaded onto a plasma processing tool to configure the tool for ptocessing a substrate Again, the same XML file 806 with a recipe design layout may be employed to preside a report 844 and/or a PDF report 846
{Para 55] As can be appreciated from the embodiments of the invention, the VlDHiV provides for a simple visual IDE that requires no programming skill and/or knowledge by a
12 user By simplifying the creation of a customized software application, the creation process may now be push-down to ut>e?s that undeistand the application requirement 1« addition, changes and or updates to the customized software application may be easih implemented without requiring debugging and/or compiling to be performed Thus, the V IDhA røa\ eliminate high overhead costs and may reduce development time
{Para 56] While this inv ention has been described in terms of .several preferred embodiments, theie are alterations, permutations, and equivalents, which fall within the scope of this invention Also, the title, summary, and abstract aie provided herein for convenience and should not be used to construe the scope of the claims herein It should also be noted that there aie many alternativ e uays of implementing the methods and apparatuses of the present invention Although various examples are provided herein, it is intended that these examples be illustrative and not limiting -with respect to the invention Furthei, in this application, a set of "if items refers zero oi more items in the set It is therefore intended that the follow ing appended claims be interpreted as including all such alterations, permutations, and equh alents as fall within the true spirit and scope of the present invention
Next Patent: AIR CLEANER AND SHUT-DOWN METHOD