Title:
PLASMA RESISTANT MEMBER, PLASMA TREATMENT DEVICE COMPONENT, AND PLASMA TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/106871
Kind Code:
A1
Abstract:
The present disclosure pertains to a plasma resistant member in which a surface to be exposed to plasma is formed from a single crystal yttrium-aluminum-garnet (YAG) having a {100} plane, and a plasma treatment device and a plasma treatment device component using the plasma resistant member. In the case when there is more than one surface which is to be exposed to plasma, at least the surface for which the highest plasma resistance is required is formed from the single crystal YAG having a {100} plane.
Inventors:
YAMASHIRO MAMORU (JP)
KUBO YOSHINORI (JP)
YUKIHIRO KEIJI (JP)
KUBO YOSHINORI (JP)
YUKIHIRO KEIJI (JP)
Application Number:
PCT/JP2020/043670
Publication Date:
June 03, 2021
Filing Date:
November 24, 2020
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/3065; H05H1/46; H01L21/31
Domestic Patent References:
| WO2014119177A1 | 2014-08-07 |
Foreign References:
| US20130277332A1 | 2013-10-24 | |||
| JPH10236871A | 1998-09-08 | |||
| JP2010070854A | 2010-04-02 | |||
| JPH1045461A | 1998-02-17 |
Other References:
See also references of EP 4068912A4
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
Download PDF:
Previous Patent: TOOTHBRUSH
Next Patent: SOLAR CELL MODULE, PRODUCTION METHOD FOR SAME, AND BUILDING EXTERNAL WALL MATERIAL USING SAME
Next Patent: SOLAR CELL MODULE, PRODUCTION METHOD FOR SAME, AND BUILDING EXTERNAL WALL MATERIAL USING SAME