Title:
PLASMA-RESISTANT MEMBER
Document Type and Number:
WIPO Patent Application WO/2015/198998
Kind Code:
A1
Abstract:
Provided is a plasma-resistant member characterized by comprising a base and a layer structure formed on a surface of the base by an aerosol deposition method, the layer structure comprising polycrystalline yttria and having plasma resistance, wherein the polycrystalline yttria constituting the layer structure has crystal structures comprising a mixture of a cubic system and a monoclinic system, the proportion of the monoclinic system to the cubic system in the polycrystalline yttria constituting the layer structure being 0-60%, and the polycrystalline yttria constituting the layer structure has a crystallite size of 8-50 nm.
Inventors:
IWASAWA JUNICHI (JP)
Application Number:
PCT/JP2015/067782
Publication Date:
December 30, 2015
Filing Date:
June 19, 2015
Export Citation:
Assignee:
TOTO LTD (JP)
International Classes:
C23C24/04; C04B41/87
Domestic Patent References:
| WO2013099890A1 | 2013-07-04 |
Foreign References:
| JP2007131943A | 2007-05-31 | |||
| JP2012136782A | 2012-07-19 |
Attorney, Agent or Firm:
HYUGAJI, Masahiko et al. (JP)
Masahiko Hiugaji (JP)
Masahiko Hiugaji (JP)
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