Title:
PLASMA-RESISTANT MEMBER
Document Type and Number:
WIPO Patent Application WO/2017/109975
Kind Code:
A1
Abstract:
Provided is a plasma-resistant member characterized in that: the plasma-resistant member comprises a substrate , and a plasma-resistant layered structure formed on the surface of the substrate and comprising an yttria polycrystal , the crystallites contained in the yttria polycrystal configuring the layered structure are not joined to each other via a heterogeneous phase; the yttria polycrystal configuring the layered structure has a crystal structure comprising only cubic crystals or a crystal structure in which cubic crystals and monoclinic crystals are mixed; and the average proportion of monoclinic crystals to cubic crystals in the yttria polycrystal configuring the layered structure is greater than 0% to 60%.
Inventors:
IWASAWA JUNICHI (JP)
Application Number:
PCT/JP2015/086337
Publication Date:
June 29, 2017
Filing Date:
December 25, 2015
Export Citation:
Assignee:
TOTO LTD (JP)
International Classes:
C23C16/505; C01F17/218; C23C4/10; C23C24/04; H01L21/3065; H01L21/31
Domestic Patent References:
| WO2013176168A1 | 2013-11-28 | |||
| WO2013099890A1 | 2013-07-04 |
Foreign References:
| JP2007131943A | 2007-05-31 | |||
| JP2006089338A | 2006-04-06 | |||
| JP2016027624A | 2016-02-18 |
Attorney, Agent or Firm:
HYUGAJI, Masahiko et al. (JP)
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