Title:
PLASMA-RESISTANT TWO-LAYER COATING FILM STRUCTURE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/182747
Kind Code:
A1
Abstract:
The present invention relates to a two-layer coating film structure formed on the surface of a ceramic or metal substrate to reduce etching by plasma and to a manufacturing method thereof. The present invention provides a plasma-resistant two-layer coating film structure comprising: a ceramic or metal substrate having pits on the surfaces thereof; a first coating layer which is a ceramic coating film formed on the surface of the substrate without cracking by means of a spray coating method excluding thermal spray, and is coated while filling the pits on the surface of the substrate, wherein the first coating layer has fine pits formed on the surface accompanying ceramic particle bonding and includes ceramic polycrystals having a crystallite size of less than 300 ㎚; and a second coating layer which is a plasma-resistant ceramic film coated on the first coating layer by means of one of chemical vapor deposition (CVD), physical vapor deposition (PVD), and atomic layer deposition (ALD) methods, and is formed to have a surface roughness (Ra) of 0.2 ㎛ or less without a separate grinding process, is coated while covering the fine pits to thereby form a surface with minimized points that can be the starting point of plasma etching, and is made of crystalline or a mixture of crystalline and amorphous materials.
Inventors:
KIM OK RYUL (KR)
KIM OK MIN (KR)
KIM OK MIN (KR)
Application Number:
PCT/KR2023/003657
Publication Date:
September 28, 2023
Filing Date:
March 20, 2023
Export Citation:
Assignee:
FEMVIX CORP (KR)
KIM OK RYUL (KR)
KIM OK MIN (KR)
KIM OK RYUL (KR)
KIM OK MIN (KR)
International Classes:
C23C28/04; C23C16/44; C23C24/04; H01J37/32
Foreign References:
| KR20210131150A | 2021-11-02 | |||
| KR102084426B1 | 2020-03-04 | |||
| KR20130123821A | 2013-11-13 | |||
| KR20100011576A | 2010-02-03 | |||
| JP2016008352A | 2016-01-18 |
Attorney, Agent or Firm:
CHO, Sung Kwang (KR)
Download PDF: