Title:
PLASMA SPRAYING AND COLD SPRAYING TECHNOLOGY-BASED METHOD FOR PREPARING A PROTECTIVE COATING FOR SURFACE OF KEY COMPONENTS AND PARTS OF IC EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2021/022791
Kind Code:
A1
Abstract:
The present invention relates to a technology for preparing a ceramic coating, specifically a plasma spraying and cold spraying technology-based method for preparing a protective coating for the surface of key components and parts of IC equipment, and belongs to the field of the plasma etching of semiconductor integrated circuit chips (wafers). A uniformly distributed protective coating is formed on the surface of a plasma etching chamber using plasma spraying and cold spraying high-speed deposition technology. The protective coating has a two-layer composite structure involving: a metal/Y2O3 coating, deposited by means of plasma spraying at the bottom layer, as a transition layer capable of decreasing the difference between the coefficients of thermal expansion of a ceramic coating and of a metal substrate and increasing the bonding strength between the coating and the substrate; and a high-purity Y2O3 ceramic coating as an outermost layer, wherein a Y2O3 ceramic powder is deposited on the metal/Y2O3 transition layer at a high speed using cold spraying high-speed deposition. A (metal/yttria)/yttria composite coating is obtained in the present invention, and is expected to achieve better plasma-etching resistance and protective effects.
Inventors:
ZHENG GUANGWEN (CN)
XIONG TIANYING (CN)
SHEN YANFANG (CN)
CUI XINYU (CN)
WANG JIQIANG (CN)
TANG JUNRONG (CN)
LI NING (CN)
QI JIANZHONG (CN)
TAO YONGSHAN (CN)
XIONG TIANYING (CN)
SHEN YANFANG (CN)
CUI XINYU (CN)
WANG JIQIANG (CN)
TANG JUNRONG (CN)
LI NING (CN)
QI JIANZHONG (CN)
TAO YONGSHAN (CN)
Application Number:
PCT/CN2020/071775
Publication Date:
February 11, 2021
Filing Date:
January 13, 2020
Export Citation:
Assignee:
SHENYANG FORTUNE PREC EQUIPMENT CO LTD (CN)
International Classes:
C23C4/134; C23C4/06; C23C24/08
Foreign References:
| CN110468367A | 2019-11-19 | |||
| CN109957748A | 2019-07-02 | |||
| CN109825827A | 2019-05-31 | |||
| CN106591820A | 2017-04-26 |
Attorney, Agent or Firm:
SHENYANG UPDATE INTELLECTUAL PROPERTY AGENCY (CN)
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