Title:
PLASMA SURFACE TREATMENT METHOD AND PLASMA SURFACE TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/179344
Kind Code:
A1
Abstract:
[Problem] To provide surface treatment technology capable of performing surface treatment on an object consisting of aggregates of small individual pieces in a manner that is thorough, reliable, and low-cost. [Solution] A spray port 33 for ionized treatment gas is disposed in a tubular passage 21 into which treatment object W is dropped. Spraying the ionized treatment gas into the tubular passage 21 from the spray port 33 forms, in the tubular passage 21, a treatment gas flow orthogonal to the direction in which the tubular passage is disposed. The treatment object W is then introduced through an opening on the upper end of the tubular passage 21, and surface treatment is performed on the treatment object W by bringing the treatment object W into contact with the treatment gas as the treatment object W is falling through the tubular passage 21.
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Inventors:
TAKASHIMA KENJI (JP)
Application Number:
PCT/JP2017/013619
Publication Date:
October 04, 2018
Filing Date:
March 31, 2017
Export Citation:
Assignee:
E2LAB CO LTD (JP)
International Classes:
B01J19/08
Foreign References:
| JP2013122876A | 2013-06-20 | |||
| US20160145520A1 | 2016-05-26 | |||
| JPS60248234A | 1985-12-07 | |||
| JP2014525820A | 2014-10-02 | |||
| JPH11209106A | 1999-08-03 | |||
| JPS63230806A | 1988-09-27 | |||
| JP2014220056A | 2014-11-20 | |||
| JP2016031916A | 2016-03-07 |
Attorney, Agent or Firm:
SANO Shogo et al. (JP)
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