Title:
PLASMA TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/026025
Kind Code:
A1
Abstract:
The present invention relates to a plasma treatment device. The plasma treatment device according to an embodiment of the present invention may comprise: a cover part attached to a body; a plasma generation part for generating plasma and providing same to the cover part; a gas supply part for supplying a source gas for generating plasma to the plasma generation part; and an exhaust part for exhausting an exhaust gas from the cover part.
Inventors:
LEE HYUNYOUNG (KR)
CHOI JEONGHAE (KR)
SONG YEONSUK (KR)
CHOI JEONGHAE (KR)
SONG YEONSUK (KR)
Application Number:
PCT/KR2016/008479
Publication Date:
February 08, 2018
Filing Date:
August 02, 2016
Export Citation:
Assignee:
FEAGLE CO LTD (KR)
International Classes:
A61N1/44; A61M35/00; A61N1/04; A61N1/08; B01D39/20; B01D53/66; H01J37/32
Foreign References:
| US20120046602A1 | 2012-02-23 | |||
| KR20160072759A | 2016-06-23 | |||
| KR101567334B1 | 2015-11-20 | |||
| KR20150114474A | 2015-10-12 | |||
| KR101260893B1 | 2013-05-06 |
Other References:
See also references of EP 3495020A4
Attorney, Agent or Firm:
KANG, Il Shin et al. (KR)
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