Title:
PLATE COATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/100506
Kind Code:
A1
Abstract:
A plate coating device comprises a first target coating chamber (1) and a second target coating chamber (2). An isolation chamber (3) is disposed between the first target coating chamber (1) and the second target coating chamber (2). A molecular pump (4) is disposed in the isolation chamber (3). The isolation chamber (3) is isolated from the first target coating chamber (1) by means of a first isolation plate (5), and is isolated from the second target coating chamber (2) by means of a second isolation plate (6). The first isolation plate (5) and the second isolation plate (6) is each provided with a slit (7). A blowing and cleaning device (8) is disposed on the first isolation plate (5).
Inventors:
SHI SHUANLIN (CN)
Application Number:
PCT/CN2017/117925
Publication Date:
May 31, 2019
Filing Date:
December 22, 2017
Export Citation:
Assignee:
BEIJING APOLLO DING RONG SOLAR TECH CO LTD (CN)
International Classes:
C23C14/34
Foreign References:
CN103237919A | 2013-08-07 | |||
CN2441813Y | 2001-08-08 | |||
CN102534538A | 2012-07-04 | |||
JP2001023907A | 2001-01-26 |
Other References:
None
Attorney, Agent or Firm:
PACIFIC CHINA PATENT AGENT CO., LTD. (CN)
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