Title:
PLATING APPARATUS WITH INDIVIDUALLY CONTROLLABLE ANODE SEGMENTS AND ASSOCIATED METHOD
Document Type and Number:
WIPO Patent Application WO/2001/094656
Kind Code:
A2
Abstract:
A programmable/controllable anode and related methods of operation. An anode to be used with an electroplating system containing a substrate (48) acting as a cathode. The anode includes a plurality of anode segments (203a, ..., 203d) and an electrical source. The electrical source is coupled to each of the anode segments. One method comprises applying electrical voltage/current to one of said plurality of anode segments. The method continues by waiting for a prescribed duration, and then applying electrical voltage/current to another one of said plurality of anode segments. Another aspect comprises first sensing the electric field generated by the anode. The method finishes by controlling the electricity supplied between different ones of the anode segments to provide a uniform electric field.
Application Number:
PCT/US2001/017864
Publication Date:
December 13, 2001
Filing Date:
June 01, 2001
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
C25D17/12; C25D21/12; H01L21/288; (IPC1-7): C23C
Domestic Patent References:
Foreign References:
| US4828654A | 1989-05-09 | | | |
| US5156730A | 1992-10-20 | | | |
Attorney, Agent or Firm:
Bernadicou, Michael A. (Sokoloff Taylor & Zafman LLP 7th floor
12400 Wilshire Boulevard Los Angeles, CA, US)
Claims:
CLAIMS What is claimed is:
| 1. |
An anode to be used with a metal deposition system containing a cathode, the anode comprising: a plurality of anode segments; and an electrical source coupled to each of the anode segments. |
| 2. |
The anode of claim 1, wherein at least two of the plurality of anode segments are aligned with each other relative to a plane taken perpendicular to the common segment axis. |
| 3. |
The anode of claim 1, wherein at least two of the plurality of anode segments are aligned with a common axis. |
| 4. |
The anode of claim 1, wherein at least two of the plurality of anode segments are not aligned with a common axis. |
| 5. |
The anode of claim 1, further comprising insulative mounts that position each one of the plurality of anode segments relative to each other. |
| 6. |
The anode of claim 1, wherein each of the plurality of anode segments is constructed from copper or a copper alloy. |
| 7. |
The anode of claim 1, wherein each one of the plurality of anode segments is physically closest to a distinct portion of the cathode. |
| 8. |
The anode of claim 1, wherein at least one of the anode segment is cylindrical. |
| 9. |
A method of supplying electricity to an anode formed from a plurality of anode segments, each one of the plurality of anode segments have a different radius, the method comprising: applying electricity to an inner one of said plurality of anode segments; waiting for a prescribed duration; and applying electricity to each next inner one of said plurality of anode segments. |
| 10. |
The method of supplying electricity to the anode as set forth in claim 9, wherein a period of said waiting for a prescribed duration is based upon an electric field generated by a cathode interacting with said anode. |
| 11. |
The method of supplying electricity to the anode as set forth in claim 10, wherein said cathode is a substrate. |
| 12. |
The method of supplying electricity to the anode of claim 9, wherein at least two of the plurality of anode segments are aligned with a common axis. |
| 13. |
The method of supplying electricity to the anode of claim 9, wherein at least two of the plurality of anode segments are not aligned with a common axis. |
| 14. |
A method of supplying electricity to an anode formed from a plurality of anode segments to be spaced from a cathode, the method comprising: sensing the electric fields generated by the anode; and controlling the electricity supplied to different ones of the plurality of anode segments in response to the sensed electric fields. |
| 15. |
The method of claim 14, wherein each one of the plurality of anode segments is physically closest to a distinct portion of the cathode. |
| 16. |
A computer readable medium that stores software that, when executed by a processor, causes a system to supply electricity to an anode formed from a plurality of anode segments to be spaced from a cathode, the software executed by the processor performs a method comprising: applying electricity to an inner one of said plurality of anode segments; waiting for a prescribed duration; and applying electricity to each next inner one of said plurality of anode segments. |
| 17. |
The method of claim 16, wherein each one of the plurality of anode segments is physically closest to a distinct portion of the cathode,. |
Description:
INTERNATIONAL SEARCH REPORT International Application No PCT/US01/17864 A. CLASSIFICATION OF SUBJECT MATTER IPC 7 C25D17/12 According to international Patent Classification (IPC) or to both national classification and IPC B. FIELDS SEARCHED Minimum documentation searched (classification system followed by classification symbols) IPC 7 C25D Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched Electronic data base consulted during the international search (name of data base and, where practical, search terms used) EPO-Internal C. DOCUMENTS CONSIDERED TO BE RELEVANT Category Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No. X WO 99 41434 A (ACM RESEARCH INC) 1-3, 19 August 1999 (1999-08-19) 7-12, 14-17 Y page 27, line 20-page 40, line 6; figures 5,6 3-18 X US 4 828 654 A (REED RONALD G) 1,2 9 May 1989 (1989-05-09) Y the whole document 5,6 X US 5 156 730 A (BHATT ANILKUMAR C ET AL) 1,2 20 October 1992 (1992-10-20) the whole document Further documents are listed in the continuation of box C. E Patent family members are listed in annex. lJ Special categories of cited documents : 'T'later document published after the international filing date 'A'document defining the general state of the art which is not or priorify date and not in conflict with ihe application but considered to be of particular relevance invention invention 'E'earlier document but published on or after the international X document of particular relevance ; the claimed invention filing date cannot be considered novel or cannot be considered to 'L'document which may throw doubts on priority claim (s) or involve an inventive step when the document is taken alone which is cited to establish the publication date of another Y document of particular relevance; the claimed invention citation or other special reason (as specified) cannot be considered to involve an inventive step when the '0'document referring to an oral disclosure, use, exhibition or document is combined with one or more other such docu- other means ments, such combination being obvious to a person skilled 'P'document published prior to the international filing date but in the art. later than the priority date claimed document member of the same patent family Date of the actual completion of the international search Date of mailing of the international search report 28 November 2001 06/12/2001 Name and mailing address of the ISA Authorized officer European Patent Office, P. B. 5818 Patentlaan 2 NL-2280 HV Rijswijk Tel. (+31-70) 340-2040, Tx 31 651 epo nl, D + Fax: (+31-70) 340-3016 NTERNATIONAL SEARCH REPORT International Application No Informationon patent family members PCT/US Ol/17864 Patentdocument Publication Patent family Publication cited in search report date member (s) date WO 9941434 A 19-08-1999 AU 2233399 A 30-08-1999 CN 1290310 T 04-04-2001 EP 1055020 A2 29-11-2000 WO 9941434 A2 19-08-1999 US 2001040100 Al 15-11-2001 US 4828654 A 09-05-1989 NONE US 5156730 A 20-10-1992 JP 5132799 A 28-05-1993
