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Patent Searching and Data


Title:
PLATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/110765
Kind Code:
A1
Abstract:
A plating device (10) having a water tank (30) into which plating solution (22) is injected, a nozzle section (40) having a cylindrical nozzle (40a) as an anode disposed inside the water tank (30), a to-be-plated object (20) as a cathode disposed parallel to the anode inside the water tank (30), a DC power source (60) for applying voltage between the nozzle section (40) and the to-be-plated object (20), and a pump (70) for causing the plating solution (22) injected into the water tank (30) to circulate so as to pass through the nozzle (40a) and be sprayed toward the to-be-plated object (20). A perforated plate member (42) having a through-hole (42a) with a smaller diameter than the inside diameter of the nozzle (40a) is arranged on the inflow side of the nozzle section (40) so that the through-hole (42a) faces the perforation region of the nozzle (40a).

Inventors:
YAMAMOTO Wataru (28-1, Sendagaya 5-chome, Shibuya-k, Tokyo 51, 〒1510051, JP)
AKIYAMA Katsunori (28-1, Sendagaya 5-chome, Shibuya-k, Tokyo 51, 〒1510051, JP)
SUZUKI Chikako (28-1, Sendagaya 5-chome, Shibuya-k, Tokyo 51, 〒1510051, JP)
ISHIGURO Masazumi (28-1, Sendagaya 5-chome, Shibuya-k, Tokyo 51, 〒1510051, JP)
Application Number:
JP2016/087860
Publication Date:
June 29, 2017
Filing Date:
December 20, 2016
Export Citation:
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Assignee:
YAMAMOTO-MS CO., LTD. (28-1, Sendagaya 5-chome Shibuya-k, Tokyo 51, 〒1510051, JP)
International Classes:
C25D21/04; C25D5/08; C25D7/12; C25D17/00; C25D21/10; H01L21/288
Foreign References:
JPS6394967U1988-06-18
JP2009501276A2009-01-15
JP2002115096A2002-04-19
Attorney, Agent or Firm:
ISONO INTERNATIONAL PATENT OFFICE, P.C. (Hulic Toranomon Building, 1-18 Toranomon 1-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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