Title:
PLATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/176186
Kind Code:
A1
Abstract:
Provided is technology with which it is possible to suppress the ingress, into a plating tank, of particles generated by a bearing of a rotation mechanism. This plating device 1000 comprises a labyrinth seal member 50. The labyrinth seal member includes: an inner labyrinth seal 53 which is located below a bearing 33 and seals the bearing; an outer labyrinth seal 54 which is located outwards of the inner labyrinth seal in the radial direction of a rotating shaft 32; a discharge port 55 which is configured so as to supply air to an inner sealing space 60 formed inwards of the inner labyrinth seal in the radial direction; and a suction port 56 which is configured to suck air within an outer sealing space 65 formed outwards of the inner labyrinth seal in the radial direction and inwards of the outer labyrinth seal in the radial direction.
Inventors:
SEKI MASAYA (JP)
TOMITA MASAKI (JP)
CHANG SHAO HUA (JP)
TOMITA MASAKI (JP)
CHANG SHAO HUA (JP)
Application Number:
PCT/JP2021/006564
Publication Date:
August 25, 2022
Filing Date:
February 22, 2021
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
C25D17/06
Foreign References:
| JP2003214578A | 2003-07-30 | |||
| JP2006249533A | 2006-09-21 | |||
| JP2006214009A | 2006-08-17 | |||
| JP2020057763A | 2020-04-09 |
Attorney, Agent or Firm:
MIYAMAE, Toru et al. (JP)
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