Title:
PLL CIRCUIT AND FILM THICKNESS MEASURING INSTRUMENT USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2010/032328
Kind Code:
A1
Abstract:
A PLL circuit comprising a phase comparator (4) for detecting a phase difference between a first signal and a second signal, a first oscillation circuit (1) for providing a standard signal to the phase comparator as the first signal, and a DDS (8) as a second oscillation circuit for outputting a signal accordingly with an output of the phase comparator, wherein a PLL loop is configured such that the output signal from the second oscillation circuit is inputted into the phase comparator as the second signal. Also, a part of the output signal from the second oscillation circuit is injected to the first oscillation circuit as an injection-locked signal. In a film thickness measuring instrument utilizing the PLL circuit as a frequency measuring circuit, a piezoelectric element (11) such as a crystal which is connected to the first oscillation circuit is accommodated within a vacuumed chamber (C). The frequency measuring circuit constituting the PLL circuit is configured to measure a film thickness of a film forming material based on changes in the number of inherent oscillations of the piezoelectric crystal caused by the film forming material being deposited over the piezoelectric element within the vacuumed chamber.
Inventors:
SATO, Hiroaki (Yonezawa-shi Yamagata, 28, 99211, JP)
Application Number:
JP2008/067096
Publication Date:
March 25, 2010
Filing Date:
September 22, 2008
Export Citation:
Assignee:
Pioneer Corporation (1-4-1 Meguro, Meguro-ku Tokyo, 54, 15386, JP)
パイオニア株式会社 (〒54 東京都目黒区目黒１－４－１ Tokyo, 15386, JP)
Tohoku Pioneer Corporation (1105 Aza-Nikko, Oaza-Kunomoto Tendo-sh, Yamagata 85, 99485, JP)
パイオニア株式会社 (〒54 東京都目黒区目黒１－４－１ Tokyo, 15386, JP)
Tohoku Pioneer Corporation (1105 Aza-Nikko, Oaza-Kunomoto Tendo-sh, Yamagata 85, 99485, JP)
International Classes:
H03L7/24; G01B17/02; G01R29/22; H03B28/00; H03L7/08; H03L7/099; H03L7/22
Attorney, Agent or Firm:
KINOSHITA, Shigeru (11Fl. Pacific Marks Kawasaki, 11-1 Ekimaehoncho Kawasaki-ku,Kawasaki-sh, Kanagawa 07, 21000, JP)
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