Title:
POLISHING ABRASIVE PARTICLE, PRODUCTION METHOD THEREFOR, POLISHING METHOD, POLISHING DEVICE, AND SLURRY
Document Type and Number:
WIPO Patent Application WO/2015/118927
Kind Code:
A1
Abstract:
[Problem] To polish the surface of an object material at a high removal rate and into a high-quality surface. [Solution] The object material is polished by wet polishing. A slurry comprises polishing abrasive particles dispersed in pure water. Each of the polishing abrasive particles comprises a component that exerts a mechanochemical action, a component that reacts to a frictional heat generated when polishing the object material, and the like, integrated into a particle as a whole. The components are bonded directly to one another by mechanical alloying while each retains the inherent properties of the substances in the individual component. Using this slurry in a lapping process for sapphire, silicon carbide, gallium nitride, and the like, allows the polishing time to be much shorter than conventionally, and allows the processing costs to be reduced significantly. The quality of the polished surface is high. The polishing abrasive particle can be used repeatedly for polishing. As the pH of the slurry is on the order of 3 to 9, there is no impact on the environment of the polishing work area, and processing of liquid waste is simple.
Inventors:
FUJIMOTO SHUNICHI (JP)
YAMASHITA TETSUJI (JP)
YAMASHITA TETSUJI (JP)
Application Number:
PCT/JP2015/051175
Publication Date:
August 13, 2015
Filing Date:
January 19, 2015
Export Citation:
Assignee:
ASAHI CHEMICAL IND (JP)
International Classes:
C09K3/14; B24B1/00; B24B37/00; C09G1/02; H01L21/304
Foreign References:
| JPH04176556A | 1992-06-24 | |||
| JP2013099831A | 2013-05-23 | |||
| JP2002038131A | 2002-02-06 | |||
| JP2014012311A | 2014-01-23 | |||
| JP2013111725A | 2013-06-10 |
Other References:
"Fabrication of the Fine Magnetic Abrasives by Using Mechanical Alloying Process and Its Polishing Characteristics", KEY ENGINEERING MATERIALS, vol. 326-328, 2006, pages 421 - 424, XP055219001
"Production of magnetic abrasive grains by mechanical alloying", ABSTRACTS OF MEETING OF JAPAN SOCIETY OF POWDER AND POWDER METALLURGY HEISEI 2 NENDO SHUKI TAIKAI, 1990, pages 2 - 30, XP008184539
"Preparation of magnetic abrasives by mechanical alloying and its finishing properties", JOURNAL OF THE JAPAN SOCIETY OF POWDER AND POWDER METALLURGY, vol. 38, no. 1, 1991, pages 55 - 58, XP008184514
See also references of EP 3103851A4
"Production of magnetic abrasive grains by mechanical alloying", ABSTRACTS OF MEETING OF JAPAN SOCIETY OF POWDER AND POWDER METALLURGY HEISEI 2 NENDO SHUKI TAIKAI, 1990, pages 2 - 30, XP008184539
"Preparation of magnetic abrasives by mechanical alloying and its finishing properties", JOURNAL OF THE JAPAN SOCIETY OF POWDER AND POWDER METALLURGY, vol. 38, no. 1, 1991, pages 55 - 58, XP008184514
See also references of EP 3103851A4
Attorney, Agent or Firm:
KATO YUJI (JP)
Yuji Kato (JP)
Yuji Kato (JP)
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