Title:
POLISHING APPARATUS, POLISHING PAD, AND POLISHING INFORMATION MANAGEMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2011/114658
Kind Code:
A1
Abstract:
Sensors, a memory which stores detected information obtained by the sensors, and a communication instrument which, by being driven by a power supply section, performs communication with the outside in a non-contact manner, are installed inside a polishing pad. A polishing information management system is formed by including the polishing pad configured as above and a communication section capable of performing communication in a non-contact manner with the communication instrument which is provided in the polishing pad. Furthermore, a polishing apparatus comprises the polishing pad configured as above, and the communication section capable of transmitting information to and receiving information from the communication instrument in a non-contact manner, said communication instrument being the one provided in the polishing pad.
Inventors:
PARK, Jaehong (())
Application Number:
JP2011/001379
Publication Date:
September 22, 2011
Filing Date:
March 09, 2011
Export Citation:
Assignee:
NITTA HAAS INCORPORATED (4-26, Sakuragawa 4-chome Naniwa-ku, Osaka-sh, Osaka 22, 〒5560022, JP)
ニッタ・ハース株式会社 (〒22 大阪府大阪市浪速区桜川４丁目４番２６号 Osaka, 〒5560022, JP)
ニッタ・ハース株式会社 (〒22 大阪府大阪市浪速区桜川４丁目４番２６号 Osaka, 〒5560022, JP)
International Classes:
B24B37/00; B24B49/10; H01L21/304
Attorney, Agent or Firm:
OKADA, Kazuhide (Chiyoda Bldg. Kitakan, 13-38 Naniwa-cho,Kita-ku, Osaka-sh, Osaka 22, 〒5300022, JP)
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Claims: