Title:
POLISHING CLOTH
Document Type and Number:
WIPO Patent Application WO/2019/021897
Kind Code:
A1
Abstract:
The present invention is a polishing cloth provided with, as forming materials: a nonwoven fabric; and a resin impregnating the nonwoven fabric, wherein the existence rate of the forming materials in an area from the center portion in the thickness direction to one surface is 30-60%, and the difference between the maximum value and the minimum value of the existence rate in the thickness direction is 10% or lower.
Inventors:
YAMAMOTO KEIJI (JP)
OKADA KOUJI (JP)
ITO SHIGENAO (JP)
OKADA KOUJI (JP)
ITO SHIGENAO (JP)
Application Number:
PCT/JP2018/026805
Publication Date:
January 31, 2019
Filing Date:
July 18, 2018
Export Citation:
Assignee:
NITTA HAAS INC (JP)
International Classes:
B24B37/24; D06M15/564; H01L21/304
Domestic Patent References:
| WO2014125797A1 | 2014-08-21 | |||
| WO2010016486A1 | 2010-02-11 |
Foreign References:
| JPS62140769A | 1987-06-24 | |||
| JP2011009584A | 2011-01-13 | |||
| JP2008207323A | 2008-09-11 | |||
| JP2014139361A | 2014-07-31 |
Attorney, Agent or Firm:
FUJIMOTO & PARTNERS (JP)
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