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Patent Searching and Data


Title:
POLISHING COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2018/131508
Kind Code:
A1
Abstract:
[Problem] To provide a polishing composition with which it is possible to use abrasive grains that do not cause defects and increase a mechanical friction effect to polish, at high speed, a substrate on which a coating film of silica or the like is formed, and also possible to achieve high surface accuracy with little scratching or the like at the same time. [Solution] A polishing composition comprising: abrasive particles; a modified microfibril cellulose obtained by oxidizing at least part of a hydroxyl group at the C6 position of a cellulose unit to a carboxy group; and a dispersant, wherein the respective contents of Na and K are 100 ppm or less per solid content weight.

Inventors:
KOMATSU MICHIO (JP)
IWASAKI YUKIHIRO (JP)
NISHIDA HIROYASU (JP)
TAWARAZAKO YUJI (JP)
NAKAYAMA KAZUHIRO (JP)
Application Number:
PCT/JP2017/047260
Publication Date:
July 19, 2018
Filing Date:
December 28, 2017
Export Citation:
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Assignee:
JGC CATALYSTS & CHEMICALS LTD (JP)
International Classes:
C09K3/14; B24B37/00; C01B33/18; C01F17/235; C08B15/04; C09G1/02; H01L21/304
Domestic Patent References:
WO2016111165A12016-07-14
Foreign References:
JP2013181169A2013-09-12
JP2016536428A2016-11-24
JP2015196693A2015-11-09
JP2011047084A2011-03-10
Other References:
SHIMIZU, M. ET AL.: "Preparation and characterization of TEMPO-oxidized cellulose nanofibrils with ammonium carboxylate groups", INTERNATIONAL JOURNAL OF BIOLOGICAL MACROMOLECULES, vol. 59, 15 April 2013 (2013-04-15), pages 99 - 104, XP028564828
Attorney, Agent or Firm:
TAKATSU Kazuya (JP)
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