POLISHING DISK WITH END-POINT DETECTION PORT - CABOT MICROELECTRONICS CORP

Title:

POLISHING DISK WITH END-POINT DETECTION PORT

Document Type and Number:

WIPO Patent Application WO2002064315

Kind Code:

A8

Abstract:

The invention provides a polishing disk (10) comprising (a) a body comprising a front surface (11), a back surface (12), and a peripheral surface (13), (b) a polishing surface, (c) an end-point detection port (15) extending through the body from the front surface to the back surface, and (d) a drainage channel (16) in fluid communication with the end-point detection port (15). The invention further provides a method of preparing such a polishing disk and a method of polishing a substrate with such a polishing disk.

Inventors:

SEVILLA ROLAND K
HICKS JAMES A
JONES JEREMY

Application Number:

PCT/US2002/004587

Publication Date:

April 08, 2004

Filing Date:

February 05, 2002

Export Citation:

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Assignee:

CABOT MICROELECTRONICS CORP (US)

International Classes:

B24B37/013; B24B37/20; B24B49/04; B24D7/12; B24D13/14; H01L21/304; (IPC1-7): B24B37/04; B24D13/12; B24D13/14; B24D7/12; B24B49/04

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