Title:
POLISHING HEAD AND POLISHING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/023829
Kind Code:
A1
Abstract:
A polishing head is provided with at least an annular rigid ring; a rubber film adhered uniformly on the rigid ring with a tensile force; an intermediate plate which is connected to the rigid ring and forms a space section with the rubber film and the rigid ring; an annular template concentrically arranged with the rigid ring at the periphery of a lower surface section of the rubber film; and a pressure adjusting mechanism which changes pressure in the space section. A plurality of airtight spaces are formed by partitioning the space section by means of at least one annular wall which is concentric with the rigid ring. The outer diameter of at least one inner airtight space among the airtight spaces partitioned by the annular wall is equivalent to the diameter of the planarity-guaranteed region of a work or more, and the pressure adjusting mechanism independently adjusts pressure in each airtight space.
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Inventors:
MASUMURA, Hisashi (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
桝村寿 (〒61 福島県西白河郡西郷村大字小田倉字大平１５０番地信越半導体株式会社 半導体白河研究所内 Fukushima, 〒9618061, JP)
HASHIMOTO, Hiromasa (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
橋本浩昌 (〒61 福島県西白河郡西郷村大字小田倉字大平１５０番地信越半導体株式会社 半導体白河研究所内 Fukushima, 〒9618061, JP)
MORITA, Kouji (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
桝村寿 (〒61 福島県西白河郡西郷村大字小田倉字大平１５０番地信越半導体株式会社 半導体白河研究所内 Fukushima, 〒9618061, JP)
HASHIMOTO, Hiromasa (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
橋本浩昌 (〒61 福島県西白河郡西郷村大字小田倉字大平１５０番地信越半導体株式会社 半導体白河研究所内 Fukushima, 〒9618061, JP)
MORITA, Kouji (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
Application Number:
JP2009/003796
Publication Date:
March 04, 2010
Filing Date:
August 07, 2009
Export Citation:
Assignee:
Shin-Etsu Handotai Co.,Ltd. (6-2 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 04, 〒1000004, JP)
信越半導体株式会社 (〒04 東京都千代田区大手町二丁目６番２号 Tokyo, 〒1000004, JP)
Fujikoshi Machinery Corp. (1650, Kiyono Matsushiro-machi, Nagano-sh, Nagano 33, 〒3811233, JP)
不二越機械工業株式会社 (〒33 長野県長野市松代町清野１６５０番地 Nagano, 〒3811233, JP)
MASUMURA, Hisashi (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
桝村寿 (〒61 福島県西白河郡西郷村大字小田倉字大平１５０番地信越半導体株式会社 半導体白河研究所内 Fukushima, 〒9618061, JP)
HASHIMOTO, Hiromasa (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
信越半導体株式会社 (〒04 東京都千代田区大手町二丁目６番２号 Tokyo, 〒1000004, JP)
Fujikoshi Machinery Corp. (1650, Kiyono Matsushiro-machi, Nagano-sh, Nagano 33, 〒3811233, JP)
不二越機械工業株式会社 (〒33 長野県長野市松代町清野１６５０番地 Nagano, 〒3811233, JP)
MASUMURA, Hisashi (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
桝村寿 (〒61 福島県西白河郡西郷村大字小田倉字大平１５０番地信越半導体株式会社 半導体白河研究所内 Fukushima, 〒9618061, JP)
HASHIMOTO, Hiromasa (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
International Classes:
B24B37/04; B24B37/00; H01L21/304
Attorney, Agent or Firm:
YOSHIMIYA, Mikio (1st Shitaya Bldg. 8F, 6-11 Ueno 7-chome, Taito-k, Tokyo 05, 〒1100005, JP)
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