Title:
POLISHING HEAD AND METHOD FOR MANUFACTURING POLISHING HEAD
Document Type and Number:
WIPO Patent Application WO/2019/058871
Kind Code:
A1
Abstract:
The present invention provides a polishing head for performing polishing by holding a rear surface of a workpiece and bringing a top surface of the workpiece into sliding contact with a polishing cloth affixed to a platen, characterized in that: the polishing head is provided with a head body and a template which holds the workpiece when the workpiece is being polished; the template is bonded to a lower surface peripheral edge portion of the head body with an adhesive interposed therebetween; and the surface of the head body that is bonded to the template is roughened. By this means, the present invention provides a polishing head with which it is possible to reduce differential interference contrast (DIC) toward the end of the template life.
Inventors:
DENDA HIROKI (JP)
KOBAYASHI YOSHIKAZU (JP)
KAWAURA YUJI (JP)
ENOMOTO TATSUO (JP)
KOBAYASHI YOSHIKAZU (JP)
KAWAURA YUJI (JP)
ENOMOTO TATSUO (JP)
Application Number:
PCT/JP2018/031333
Publication Date:
March 28, 2019
Filing Date:
August 24, 2018
Export Citation:
Assignee:
SHINETSU HANDOTAI KK (JP)
International Classes:
B24B37/30; B24B41/06; H01L21/304
Foreign References:
| JP2001287157A | 2001-10-16 | |||
| JP2006128271A | 2006-05-18 | |||
| JP2014233815A | 2014-12-15 | |||
| JPH0251057U | 1990-04-10 | |||
| JPS6310057U | 1988-01-22 |
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
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