POLISHING METHOD AND COMPOSITION FOR POLISHING

Title:

POLISHING METHOD AND COMPOSITION FOR POLISHING

Document Type and Number:

WIPO Patent Application WO/2016/072370

Kind Code:

A1

Abstract:

Provided is a method for polishing a material that has a Vickers hardness of 1,500 Hv or more. This polishing method comprises: a step for performing preliminary polishing with use of a composition for preliminary polishing, which contains abrasive grains APRE; and a step for performing finish polishing with use of a composition for finish polishing, which contains abrasive grains AFIN that have a lower hardness than the abrasive grains APRE.

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Inventors:

TAKAHASHI SHUHEI (JP)
TOMATSU MASATOSHI (JP)

Application Number:

PCT/JP2015/080843

Publication Date:

May 12, 2016

Filing Date:

October 30, 2015

Export Citation:

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Assignee:

FUJIMI INC (JP)

International Classes:

B24B37/00; B24B1/00; C09K3/14; H01L21/304; C09G1/02

Foreign References:

JP2006093666A	2006-04-06
JP2006332437A	2006-12-07
JPH09262757A	1997-10-07
JP2010023199A	2010-02-04
JP2008068390A	2008-03-27

Other References: