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Patent Searching and Data


Title:
POLISHING METHOD AND POLISHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2000/007771
Kind Code:
A1
Abstract:
A polishing method and a polishing device that are designed such that the in-plane pressing force between a work and an abrasive cloth is substantially uniform to improve the quality of the work. A surface plate (2) is supported on the grooved surface of a surface plate support (3a) having grooves (9a) extending straight. Work (W) is pressed against an abrasive cloth (8) stuck to the surface plate (2) while having abrasive material being fed thereto, the work (W) and surface plate (2) being rotated to thereby effect polishing.

Inventors:
Okamura, Kouichi (Naoetsu Electronics Co, Ltd. 596-2, Oaza Jounokoshishinden Kubiki-mura Nakakubiki-gun Niigata, 942-0157, JP)
Suzuki, Fumio (SEH Shirakawa R & D Center Shin-Etsu Handotai Co, Ltd. 150 Aza Ohir, Oaza Odakura Nishigo-mura Nishishirakawa-gun Fukushima, 961-8061, JP)
Masumura, Hisashi (SEH Shirakawa R & D Center Shin-Etsu Handotai Co, Ltd. 150 Aza Ohir, Oaza Odakura Nishigo-mura Nishishirakawa-gun Fukushima, 961-8061, JP)
Application Number:
PCT/JP1999/004062
Publication Date:
February 17, 2000
Filing Date:
July 29, 1999
Export Citation:
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Assignee:
SHIN-ETSU HANDOTAI CO., LTD. (4-2 Marunouchi 1-chome Chiyoda-ku Tokyo, 100-0005, JP)
Okamura, Kouichi (Naoetsu Electronics Co, Ltd. 596-2, Oaza Jounokoshishinden Kubiki-mura Nakakubiki-gun Niigata, 942-0157, JP)
Suzuki, Fumio (SEH Shirakawa R & D Center Shin-Etsu Handotai Co, Ltd. 150 Aza Ohir, Oaza Odakura Nishigo-mura Nishishirakawa-gun Fukushima, 961-8061, JP)
Masumura, Hisashi (SEH Shirakawa R & D Center Shin-Etsu Handotai Co, Ltd. 150 Aza Ohir, Oaza Odakura Nishigo-mura Nishishirakawa-gun Fukushima, 961-8061, JP)
International Classes:
B24B37/04; B24B37/12; B24B37/16; B24B41/047; B24D9/08; H01L21/304; (IPC1-7): B24B37/04
Foreign References:
JPH05237761A1993-09-17
JPS61175352U1986-10-31
Other References:
See also references of EP 1020254A4
Attorney, Agent or Firm:
Arafune, Hiroshi (5F Nikko Kagurazaka Building 18, Iwato-cho Shinjuku-ku Tokyo, Iwato-cho Shinjuku-ku Tokyo, 162-0832, JP)
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