Title:
POLISHING METHOD AND POLISHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/033724
Kind Code:
A1
Abstract:
Provided is a method of achieving appropriate supply of a workpiece to a carrier in a conveying process, the aforementioned appropriate supply not being achieved in conventional conveying processes. More specifically, provided is a method comprising: placing, between an upper platen and a lower platen, at least one carrier which holds a workpiece to be polished; inserting the workpiece into a hole in the carrier; holding the carrier and the workpiece between the upper platen and the lower platen; rotating at least one of either the upper platen or the lower platen, with polishing solution supplied between the upper platen and the lower platen; and thereby polishing the workpiece retained by the carrier. In this method, when inserting the workpiece into the hole in the carrier, the workpiece is carried to a position above the lower platen, with the ends of the workpiece retained, and is positioned in place with respect to the hole in the carrier on the lower platen, then is released from retention, thereby being dropped slowly toward the hole through the guidance of a guide.
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Inventors:
FUKUSHIMA, Hiroto (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
福島 浩人 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
MIURA, Tomonori (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
三浦 友紀 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
NAKAO, Shoji (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
福島 浩人 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
MIURA, Tomonori (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
三浦 友紀 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
NAKAO, Shoji (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
Application Number:
JP2010/005154
Publication Date:
March 24, 2011
Filing Date:
August 20, 2010
Export Citation:
Assignee:
SUMCO CORPORATION (2-1 Shibaura 1-chome, Minato-ku Tokyo, 34, 〒1058634, JP)
株式会社ＳＵＭＣＯ (〒34 東京都港区芝浦一丁目２番１号 Tokyo, 〒1058634, JP)
Sumitomo Metal Fine Technology Co., Ltd. (1-22, Kawahara-cho Kashiwara-sh, Osaka 04, 〒5820004, JP)
株式会社住友金属ファインテック (〒04 大阪府柏原市河原町１番２２号 Osaka, 〒5820004, JP)
FUKUSHIMA, Hiroto (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
福島 浩人 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
MIURA, Tomonori (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
株式会社ＳＵＭＣＯ (〒34 東京都港区芝浦一丁目２番１号 Tokyo, 〒1058634, JP)
Sumitomo Metal Fine Technology Co., Ltd. (1-22, Kawahara-cho Kashiwara-sh, Osaka 04, 〒5820004, JP)
株式会社住友金属ファインテック (〒04 大阪府柏原市河原町１番２２号 Osaka, 〒5820004, JP)
FUKUSHIMA, Hiroto (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
福島 浩人 (〒34 東京都港区芝浦一丁目２番１号 株式会社ＳＵＭＣＯ内 Tokyo, 〒1058634, JP)
MIURA, Tomonori (2-1 Shibaura 1-chome, Minato-k, Tokyo 34, 〒1058634, JP)
International Classes:
B24B37/04; H01L21/304; H01L21/677
Attorney, Agent or Firm:
SUGIMURA, Kenji (36F Kasumigaseki Common Gate West, 3-2-1 Kasumigaseki, Chiyoda-k, Tokyo 13, 〒1000013, JP)
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