Title:
POLISHING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/065415
Kind Code:
A1
Abstract:
(1) There is prepared a polishing apparatus comprising a disk-shaped grinding stone holding plate (13) which holds an annular grinding stone (11) on the lower surface and has a disk-shaped ultrasonic wave oscillator (12) installed in the central section of the upper surface; a rotation disk (16) which holds the grinding stone holding plate via an annular connecting implement (15); and a rotation shaft (17) connected to the rotation disk. In this respect, an independent structure consisting of the grinding stone holding plate and the ultrasonic wave oscillator is prepared, and alternating current voltage having a frequency which is set within a range of 15 to 100 kHz is applied to the ultrasonic wave oscillator, with the result that multiple annular nodes appear regarding vibrations generated as a consequence of the above. The annular connecting implement and the grinding stone holding plate are connected to each other at the positions of those aforementioned multiple annular nodes which are located on the outer peripheral side of the grinding stone holding plate. (2) There is prepared a fixing table (22) such that an article to be polished (21) is fixed to the upper surface thereof. (3) Furthermore, with the rotation shaft rotated, the annular grinding stone is made to contact the article to be polished. At the same time, the alternating current voltage having the frequency which is set in process (1) is applied to the ultrasonic oscillator. Thereby the article to be polished is polished, with the annular grinding stone vibrated.
Inventors:
OHNISHI, Kazumasa (121-35, Hanazonohigashi 2-chome Nagaoka-sh, Niigata 46, 〒9400846, JP)
Application Number:
JP2010/071004
Publication Date:
June 03, 2011
Filing Date:
November 25, 2010
Export Citation:
Assignee:
OHNISHI, Kazumasa (121-35, Hanazonohigashi 2-chome Nagaoka-sh, Niigata 46, 〒9400846, JP)
International Classes:
B24B1/04; B24D7/00
Attorney, Agent or Firm:
YANAGAWA, Yasuo et al. (Mitsuya-Yotsuya Building 8th Floor, 2-14 Yotsuya, Shinjuku-k, Tokyo 04, 〒1600004, JP)
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