Title:
POLISHING NANOFIBER AGGREGATE AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2019/106774
Kind Code:
A1
Abstract:
Provided are: a polishing nanofiber aggregate capable of suppressing a reduction in polishing efficiency even when fine abrasive powder is used; and a method for producing the same. A polishing nanofiber aggregate (1) can be used by adsorbing thereon a slurry having fine abrasive powder mixed in a liquid. The polishing nanofiber aggregate (1) has an average fiber diameter (d) of 400-1000 nm, and a porosity (η) of 0.70-0.95. In the polishing nanofiber aggregate (1), the distance (e1) between fibers can be reduced without compromising porosity (η). As a result, it is possible to inhibit abrasive grains having a small particle size from entering the spaces between the fibers.
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Inventors:
IKEGAYA Morihiko (8-10 Ueno 3 Chome, Iwatsuki-ku, Saitama-sh, Saitama 73, 〒3390073, JP)
SOTA Hiroyoshi (8-10 Ueno 3 Chome, Iwatsuki-ku, Saitama-sh, Saitama 73, 〒3390073, JP)
HIROGAKI Toshiki (1-3 Tatara Miyakodani Kyotanabe-sh, Kyoto 94, 〒6100394, JP)
AOYAMA Eiichi (1-3 Tatara Miyakodani Kyotanabe-sh, Kyoto 94, 〒6100394, JP)
WU wei (1-3 Tatara Miyakodani Kyotanabe-sh, Kyoto 94, 〒6100394, JP)
SOTA Hiroyoshi (8-10 Ueno 3 Chome, Iwatsuki-ku, Saitama-sh, Saitama 73, 〒3390073, JP)
HIROGAKI Toshiki (1-3 Tatara Miyakodani Kyotanabe-sh, Kyoto 94, 〒6100394, JP)
AOYAMA Eiichi (1-3 Tatara Miyakodani Kyotanabe-sh, Kyoto 94, 〒6100394, JP)
WU wei (1-3 Tatara Miyakodani Kyotanabe-sh, Kyoto 94, 〒6100394, JP)
Application Number:
JP2017/042926
Publication Date:
June 06, 2019
Filing Date:
November 29, 2017
Export Citation:
Assignee:
M-TECHX INC. (8-10, Ueno 3 Chome Iwatsuki-ku, Saitama-sh, Saitama 73, 〒3390073, JP)
International Classes:
B24D11/00
Domestic Patent References:
| WO2007018165A1 | 2007-02-15 |
Foreign References:
| JP2010069592A | 2010-04-02 | |||
| JP2008240168A | 2008-10-09 | |||
| JPH02234967A | 1990-09-18 | |||
| JP2012219391A | 2012-11-12 | |||
| JP2012046843A | 2012-03-08 |
Attorney, Agent or Firm:
OPUS IP LAW FIRM (FORECAST SHINJUKU AVENUE 6F, 5-12 Shinjuku 2-Chome, Shinjuku-k, Tokyo 22, 〒1600022, JP)
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