Title:
POLISHING PAD AND CHEMICAL MECHANICAL POLISHING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/052173
Kind Code:
A1
Abstract:
One aspect of the present disclosures is a polishing pad that contains a non-woven fabric formed from a fiber bundle of microfibers having an average cross-sectional area of 0.1-30 μm2, and an elastomer applied within the non-woven fabric. In a vertical section in the direction of thickness, the average number density (D1) of fiber bundle cross-sections in the region within a thickness of 20% in the direction of thickness from a first surface is 1000-5000/mm2, and the ratio (D1/D2) between D1 and the average number density (D2) of fiber bundle cross sections in the region within a thickness of 20% in the direction of thickness from a second surface which is on the reverse of the first surface is 1.3-5.
Inventors:
TAKAOKA, Nobuo (())
高岡 信夫 (())
KATO, Mitsuru (())
加藤 充 (())
高岡 信夫 (())
KATO, Mitsuru (())
加藤 充 (())
Application Number:
JP2010/006269
Publication Date:
May 05, 2011
Filing Date:
October 22, 2010
Export Citation:
Assignee:
KURARAY CO., LTD. (1621, Sakazu Kurashiki-sh, Okayama 01, 〒7100801, JP)
株式会社クラレ (〒01 岡山県倉敷市酒津１６２１ Okayama, 〒7100801, JP)
TAKAOKA, Nobuo (())
高岡 信夫 (())
KATO, Mitsuru (())
株式会社クラレ (〒01 岡山県倉敷市酒津１６２１ Okayama, 〒7100801, JP)
TAKAOKA, Nobuo (())
高岡 信夫 (())
KATO, Mitsuru (())
International Classes:
B24B37/00; D06N7/00; H01L21/304
Attorney, Agent or Firm:
ISHII, Kazuo et al. (Kitahama-Yamamoto Building, 3-6 Kitahama 2-chome, Chuo-k, Osaka-shi Osaka 41, 〒5410041, JP)
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