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Title:
POLISHING PAD DRESSER HAVING ROUNDED EDGE PART AND POLISHING DEVICE COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2019/027077
Kind Code:
A1
Abstract:
The present invention relates to a polishing pad dresser, which includes diamond particles formed on a surface thereof and has a rounded edge part, and a polishing device comprising the same, the polishing pad dresser comprising: a flat surface portion, a surface of which is flat from a center of the dresser; a curved portion, a surface of which is formed as a rounded edge; and a slope portion, a surface of which has a predetermined slope angle, wherein: the flat surface portion occupies a portion from a rotating shaft to 89% or less of an outer diameter of the dresser; the curved portion occupies a portion from the rotating shaft beyond 89% of the outer diameter of the dresser to 96% or less thereof; and the slope portion has a slope angle of 5-11 degrees with respect to a parallel extension line of the flat surface portion of the dresser at a point where the slope portion meets the curved portion.

Inventors:
OH KWANG-HO (KR)
KIM TAI-KYUNG (KR)
LEE SANG-HO (KR)
Application Number:
PCT/KR2017/008624
Publication Date:
February 07, 2019
Filing Date:
August 09, 2017
Export Citation:
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Assignee:
SAESOL DIAMOND IND CO LTD (KR)
International Classes:
B24B53/017; B24B53/12; B65D53/02
Foreign References:
KR20090089263A2009-08-21
JP2013043243A2013-03-04
KR20170032325A2017-03-22
JP2005019669A2005-01-20
KR20160056946A2016-05-20
Attorney, Agent or Firm:
HANYANG PATENT FIRM (KR)
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