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Patent Searching and Data


Title:
POLISHING PAD AND METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING ABRASIVE
Document Type and Number:
WIPO Patent Application WO/2017/209050
Kind Code:
A1
Abstract:
Provided is a polishing pad having a knit fabric configured from a warp and a weft, and a resin with which the knit fabric is impregnated, the polishing pad having a cross-section cut along the direction of the surface of the knit fabric as a polishing surface.

Inventors:
TOKUSHIGE, Shin (272, Ohshinden, Saijo-sh, Ehime 42, 〒7991342, JP)
NAKASE, Keisuke (18-12, Nihonbashiningyocho 1-chome, Chuo-k, Tokyo 13, 〒1030013, JP)
KASHIWADA, Hiroshi (272, Ohshinden, Saijo-sh, Ehime 42, 〒7991342, JP)
YAMADA, Tatsuya (272, Ohshinden, Saijo-sh, Ehime 42, 〒7991342, JP)
NARADA, Yousuke (272, Ohshinden, Saijo-sh, Ehime 42, 〒7991342, JP)
KOIKE, Kenichi (272, Ohshinden, Saijo-sh, Ehime 42, 〒7991342, JP)
Application Number:
JP2017/019916
Publication Date:
December 07, 2017
Filing Date:
May 29, 2017
Export Citation:
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Assignee:
FUJIBO HOLDINGS, INC. (18-12, Nihonbashiningyocho 1-chome Chuo-k, Tokyo 13, 〒1030013, JP)
International Classes:
B24B37/24; H01L21/304
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (TMI ASSOCIATES, 23rd Floor Roppongi Hills Mori Tower, 6-10-1, Roppongi, Minato-k, Tokyo 23, 〒1066123, JP)
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