Title:
POLISHING PADS AND MANUFACTURING METHODS
Document Type and Number:
WIPO Patent Application WO2003037565
Kind Code:
A3
Abstract:
Disclosed is a method of manufacturing polymer materials having properties that are determined by selected process conditions. The properties can be modified for a variety of applications. Exemplary applications are pads for chemical mechanical planarization of substrates and pads for polishing substrates. One embodiment of the method includes the steps of providing a polymer sheet having a substrate contacting area, heating the area a sufficient amount, and applying a sufficient amount of mechanical pressure to the area during at least a portion of the heating step to achieve the desired properties for the material.
Inventors:
THOMAS WEST INC (US)
WEST THOMAS (US)
DIETZ DONALD P
WEST THOMAS (US)
DIETZ DONALD P
Application Number:
PCT/US2002/034618
Publication Date:
October 23, 2003
Filing Date:
October 29, 2002
Export Citation:
Assignee:
THOMAS WEST INC (US)
WEST THOMAS (US)
WEST THOMAS (US)
International Classes:
B24B37/24; B24D11/00; B24D13/14; (IPC1-7): B29C43/20
Foreign References:
| FR2673574A1 | 1992-09-11 | |||
| US6106754A | 2000-08-22 | |||
| US4927432A | 1990-05-22 | |||
| US5868605A | 1999-02-09 | |||
| US4728552A | 1988-03-01 | |||
| US20010000772A1 | 2001-05-03 |
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