POLYCARBOCYCLIC DERIVATIVES FOR MODIFICATION OF RESIST, OPTICAL AND ETCH RESISTANCE PROPERTIES

WIPO Patent Application WO2003038523

A3

Mixed carbocycle derivatives containing at least two carbocycles per molecule from the group of anthracenes, adamantanes and steroids with functionalized carbon chains are synthesized and used as modifiers of resist properties and especially etch resistance enhancement and absorption characteristics. These derivatives are characterized by formulas I-V, where A and R may be an anthryl- and/or an adamantyl- and/or a steroid moiety. Methods for the preparation of the above compounds are disclosed.

GOGOLIDES EVANGELOS (GR)
ARGITIS PANAGIOTIS (GR)
COULADOUROS ELIAS ANDREA (GR)
VIDALI VERONIKI PETROU (GR)
VASILOPOULOU MARIA (GR)
CORDOYIANNIS GEORGE (GR)

PCT/EP2002/012284

December 18, 2003

October 31, 2002

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NCSR DEMOKRITOS (GR)
GOGOLIDES EVANGELOS (GR)
ARGITIS PANAGIOTIS (GR)
COULADOUROS ELIAS ANDREA (GR)
VIDALI VERONIKI PETROU (GR)
VASILOPOULOU MARIA (GR)
CORDOYIANNIS GEORGE (GR)

C07C69/00; C07C69/96; C07C211/31; C07C211/42; C07C211/61; C07C233/65; C07H13/08; C07J7/00; C07J41/00; G03F7/004; G03F7/039; (IPC1-7): G03F7/004; C07C69/00

EP1126320A2	2001-08-22
US6238842B1	2001-05-29
DE10009183A1	2000-09-28
US6156477A	2000-12-05
EP0726500A1	1996-08-14
US6045968A	2000-04-04
US6037107A	2000-03-14
EP0834770A2	1998-04-08

G. DABBAGH ET AL.: "Model study by FT-IR of the interaction of select cholate dissolution inhibitors with poly(norbornene-alt-maleic anhydride) and its derivatives", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, vol. 3678, no. 1, 17 March 1999 (1999-03-17), USA, pages 86 - 93, XP002206083

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