Title:
POLYCRYSTALLINE SILICON INGOT MANUFACTURING APPARATUS, POLYCRYSTALLINE SILICON INGOT MANUFACTURING METHOD, AND POLYCRYSTALLINE SILICON INGOT
Document Type and Number:
WIPO Patent Application WO/2012/011523
Kind Code:
A1
Abstract:
Provided are a polycrystalline silicon ingot manufacturing apparatus whereby production yield of a polycrystalline silicon is significantly improved by reducing a portion where oxygen concentration is locally high at the bottom, a polycrystalline silicon ingot manufacturing method, and a polycrystalline silicon ingot. A polycrystalline silicon ingot manufacturing apparatus (10) has: a crucible (20) having a rectangular cross-section; an upper heater (43) disposed above the crucible (20); and a lower heater (33) disposed below the crucible (20). The manufacturing apparatus solidifies a silicon melt (3) upward in one direction from bottom surface (21), said melt being contained in the crucible (20), and the manufacturing apparatus is characterized in being provided with an auxiliary heater (50) which heats, on the bottom surface (21) side of the crucible (20), at least a part of the side wall portion (22) of the crucible (20).
Inventors:
TSUZUKIHASHI Koji (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
続橋 浩司 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
WAKITA Saburo (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
脇田 三郎 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
続橋 浩司 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
WAKITA Saburo (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
脇田 三郎 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
Application Number:
JP2011/066546
Publication Date:
January 26, 2012
Filing Date:
July 21, 2011
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORPORATION (3-2 Otemachi 1-chome, Chiyoda-ku Tokyo, 17, 〒1008117, JP)
三菱マテリアル株式会社 (〒17 東京都千代田区大手町一丁目３番２号 Tokyo, 〒1008117, JP)
Mitsubishi Materials Electronic Chemicals Co., Ltd. (1-6 Barajima 3-chome, Akita-shi Akita, 85, 〒0108585, JP)
三菱マテリアル電子化成株式会社 (〒85 秋田県秋田市茨島三丁目１番６号 Akita, 〒0108585, JP)
TSUZUKIHASHI Koji (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
続橋 浩司 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
三菱マテリアル株式会社 (〒17 東京都千代田区大手町一丁目３番２号 Tokyo, 〒1008117, JP)
Mitsubishi Materials Electronic Chemicals Co., Ltd. (1-6 Barajima 3-chome, Akita-shi Akita, 85, 〒0108585, JP)
三菱マテリアル電子化成株式会社 (〒85 秋田県秋田市茨島三丁目１番６号 Akita, 〒0108585, JP)
TSUZUKIHASHI Koji (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
続橋 浩司 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
International Classes:
C01B33/02; C30B28/06; C30B29/06; H01L31/04
Attorney, Agent or Firm:
SHIGA Masatake et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
Claims: