Title:
POLYCRYSTALLINE SILICON INGOT PRODUCTION DEVICE PROVIDED WITH A ROTATING DOOR OPENING AND SHUTTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/037343
Kind Code:
A2
Abstract:
The present invention is a polycrystalline silicon ingot production device comprising a vacuum chamber, a crucible, a heater, a susceptor, a cooling plate, a door opening and shutting device which is provided between the crucible and the cooling plate and restricts the release of heat in order to melt or grow silicon, a temperature sensor and a control unit which receives the output value of the temperature sensor and controls the temperature inside the crucible such that the silicon inside the crucible is melted and uniformly grown; wherein the door opening and shutting device consists of a first door and a second door which are formed with an opening a predetermined interval apart, and incorporates a drive unit for selectively opening and shutting the opening through relative rotation between the first door and the second door.
Inventors:
KIM HAN SUNG (KR)
Application Number:
PCT/KR2010/006183
Publication Date:
March 31, 2011
Filing Date:
September 10, 2010
Export Citation:
Assignee:
GLOSIL INC (KR)
KIM HAN SUNG (KR)
KIM HAN SUNG (KR)
International Classes:
C30B21/02; C30B35/00
Foreign References:
| KR20080068423A | 2008-07-23 | |||
| KR20090035336A | 2009-04-09 | |||
| JP2009533288A | 2009-09-17 | |||
| JP2003327403A | 2003-11-19 | |||
| KR200411950Y1 | 2006-03-21 | |||
| JP2007332022A | 2007-12-27 |
Attorney, Agent or Firm:
PATENT LAW FIRM GRAND KOREA (KR)
특허법인 대한 (KR)
특허법인 대한 (KR)
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