Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
POROUS PAD, VACUUM CHUCK DEVICE, AND PLANE FORMING METHOD FOR POROUS PAD
Document Type and Number:
WIPO Patent Application WO/2019/181652
Kind Code:
A1
Abstract:
This porous pad (20) is provided with: a porous ceramic portion (25) having formed a plurality of pores providing permeability to allow for passage of a fluid; and an antislip portion (27) which is formed on the porous ceramic portion (25) so as to contact a part of a work (W) as an example of an object to be mounted that is mounted on the porous ceramic portion (25), and which has a static coefficient of friction higher than that of the porous ceramic portion (25).

Inventors:
TAKATA Atsushi (2-10, Jyooka 3-chome, Nagaoka-sh, Niigata 21, 〒9400021, JP)
TAKATA Hisatoshi (2-10, Jyooka 3-chome, Nagaoka-sh, Niigata 21, 〒9400021, JP)
OHASHI Kyosuke (2-10, Jyooka 3-chome, Nagaoka-sh, Niigata 21, 〒9400021, JP)
Application Number:
JP2019/010019
Publication Date:
September 26, 2019
Filing Date:
March 12, 2019
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NANO TEM CO., LTD. (2-10, Jyooka 3-chome Nagaoka-sh, Niigata 21, 〒9400021, JP)
International Classes:
H01L21/683; B23Q3/08; B24B41/06; B25B11/00
Foreign References:
JPH11309638A1999-11-09
JPH07283295A1995-10-27
JPH09174364A1997-07-08
JPH06244269A1994-09-02
JPS6282343A1987-04-15
JP2007220887A2007-08-30
JP2014090038A2014-05-15
Attorney, Agent or Firm:
KIMURA Mitsuru (2nd Floor, Kyohan Building 7, Kandanishiki-cho 2-chome, Chiyoda-k, Tokyo 54, 〒1010054, JP)
Download PDF: