Title:
PORTABLE SURFACE SHAPE MEASURER
Document Type and Number:
WIPO Patent Application WO/2002/039057
Kind Code:
A1
Abstract:
A portable surface shape measurer, comprising a linear guide rail, a table engaged with the guide rail movably along the guide rail, a stage engaged with the table movably in the lateral axial direction of the guide rail orthogonal to the longitudinal axis direction, a non-contact displacement sensor fixed to the stage, a first drive means for driving the table, a first coordinate detection means for detecting the longitudinal axis coordinate of the non-contact displacement sensor, a second drive means for driving the stage, a second coordinate detection means for detecting the lateral axis coordinate of the non-contact displacement sensor, a coordinate correction means for correcting the lateral axis coordinate of the non-contact displacement sensor by using the deflection of the guide rail in lateral axis direction, a support member for supporting the guide rail, and a support member positioning means for positioning the support member on a measured surface.
Inventors:
NAKAGAWA OSAMU (JP)
NAKAYAMA YASUO (JP)
UCHIMURA TAKESHI (JP)
NAKAYAMA YASUO (JP)
UCHIMURA TAKESHI (JP)
Application Number:
PCT/JP2001/009728
Publication Date:
May 16, 2002
Filing Date:
November 07, 2001
Export Citation:
Assignee:
TOTO LTD (JP)
NAKAGAWA OSAMU (JP)
NAKAYAMA YASUO (JP)
UCHIMURA TAKESHI (JP)
NAKAGAWA OSAMU (JP)
NAKAYAMA YASUO (JP)
UCHIMURA TAKESHI (JP)
International Classes:
G01B5/28; G01B21/20; G01B21/30; (IPC1-7): G01B21/20; G01B21/00
Foreign References:
JPH07190747A | 1995-07-28 | |||
JPH07229733A | 1995-08-29 | |||
JPH05149739A | 1993-06-15 | |||
JPH029572A | 1990-01-12 | |||
JPS6337288A | 1988-02-17 |
Attorney, Agent or Firm:
Sakaguchi, Yoshihiko (Harigaya 3-chome Urawa-ku Saitama-shi, Saitama, JP)
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