Title:
POSITION CORRECTING DEVICE, VACUUM PROCESSING EQUIPMENT, AND POSITION CORRECTING METHOD
Document Type and Number:
WIPO Patent Application WO/2006/137476
Kind Code:
A1
Abstract:
A technique capable of eliminating positional displacement without employing a conveyance robot. Objects (31-33) to be conveyed that are placed on a placement table (55) are rotated, and after an error angle (&agr ) is set to zero, a temporary placement section (16) is obliquely moved until a horizontal component is an error distance (L). The center (O’) of the objects (31-33) to be conveyed are positioned on the central axis (58) of the placement table (55) to place the objects on the placement table (55). When the direction of a notch is determined, the placement table (55) is further rotated by a desired amount. Consequently, the error angle (&agr ) and the error distance (L) can be eliminated without employing a conveyance robot.
Inventors:
Fujii, Yoshinori c/o Fuji, Susono Plant (ULVAC Inc. 1220-1, Suyama Susono-shi Shizuoka 31, 41012, JP)
Application Number:
PCT/JP2006/312492
Publication Date:
December 28, 2006
Filing Date:
June 22, 2006
Export Citation:
Assignee:
ULVAC, INC. (2500 Hagisono, Chigasaki-shi Kanagawa, 43, 25385, JP)
Fujii, Yoshinori c/o Fuji, Susono Plant (ULVAC Inc. 1220-1, Suyama Susono-shi Shizuoka 31, 41012, JP)
Fujii, Yoshinori c/o Fuji, Susono Plant (ULVAC Inc. 1220-1, Suyama Susono-shi Shizuoka 31, 41012, JP)
International Classes:
H01L21/68; B65G49/07
Attorney, Agent or Firm:
Ishijima, Shigeo (Toranomonkougyou Bldg, 3F 1-2-18, Toranomon, Minato-k, Tokyo 01, 10500, JP)
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