POSITION-DEPENDENT OPTICAL METROLOGY CALIBRATION

Title:

POSITION-DEPENDENT OPTICAL METROLOGY CALIBRATION

Document Type and Number:

WIPO Patent Application WO2003050514

Kind Code:

A3

Abstract:

An optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependent quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. A portion of the characterization of the optical system may be accomplished by using titled black glass to provide a non-reflective reference.

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Inventors:

SEZGINER ABDURRAHMAN
JOHNSON KENNETH
NORTON ADAM E
TUITJE HOLGER A

Application Number:

PCT/US2002/039733

Publication Date:

January 29, 2004

Filing Date:

December 12, 2002

Export Citation:

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Assignee:

THERMA WAVE INC (US)

International Classes:

G01N21/27; G01N21/95; (IPC1-7): G01N21/93; G01N21/95

Foreign References:

US5747813A	1998-05-05
US5321495A	1994-06-14
US5144524A	1992-09-01

Other References:

PATENT ABSTRACTS OF JAPAN vol. 016, no. 447 (E - 1266) 17 September 1992 (1992-09-17)
PATENT ABSTRACTS OF JAPAN vol. 013, no. 218 (E - 761) 22 May 1989 (1989-05-22)
PATENT ABSTRACTS OF JAPAN vol. 014, no. 210 (E - 0922) 27 April 1990 (1990-04-27)

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