Title:
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, ELECTRONIC PART CARRYING APPARATUS, AND ELECTRONIC BEAM EXPOSURE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2002/097363
Kind Code:
A1
Abstract:
A position detection apparatus detecting a position of a mark similar to a template image from an input image has a calculation block. The calculation block includes phase difference calculation means and mark position detection means. The phase difference calculation means calculates for each frequency a phase difference between a phase component when the template image is converted into a frequency component and a phase component when an input image is converted into a frequency component assuming a predetermined position in the input image as a reference. The phase component difference calculated by the phase difference calculation means is converted into a phase impulse response function, according to which the mark position detection means detects the position of the mark in the input image.
Inventors:
YAMAGUCHI TAKAHIRO (JP)
ICHIKAWA MASAYOSHI (JP)
ICHIKAWA MASAYOSHI (JP)
Application Number:
PCT/JP2002/004632
Publication Date:
December 05, 2002
Filing Date:
May 14, 2002
Export Citation:
Assignee:
ADVANTEST CORP (JP)
YAMAGUCHI TAKAHIRO (JP)
ICHIKAWA MASAYOSHI (JP)
YAMAGUCHI TAKAHIRO (JP)
ICHIKAWA MASAYOSHI (JP)
International Classes:
G01B11/00; G03F7/20; G03F9/00; H01J37/304; H01L21/027; (IPC1-7): G01B11/00
Foreign References:
| JPH05159056A | 1993-06-25 | |||
| JPH10134184A | 1998-05-22 |
Attorney, Agent or Firm:
Ryuka, Akihiro (Shinjuku 1-chome Shinjuku-ku, Tokyo, JP)
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