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Title:
POSITION MEASUREMENT METHOD AND COMPONENT
Document Type and Number:
WIPO Patent Application WO/2018/207310
Kind Code:
A1
Abstract:
Provided is a position measurement method for highly accurately determining the position of a lens, or the like, using a position reference part of a component. In this position measurement method, the position of a given point in an image of a measurement device provided with an imaging optical system using coaxial epi-illumination is determined using the position of a position reference part as a reference. At least a base part of the position reference part has a columnar shape. A groove of a fixed width is provided around the base of the column 115. The bottom surface 121 of the groove is parallel to a flat surface. An inclined surface 123 that rises from the bottom surface at an angle θ in relation to the bottom surface and reaches the flat surface is provided at the outer circumferential edge of the bottom surface. This method includes, in an image of the measurement device, determining the position of the circumferential edge of the base of the column from the position of the outer circumferential edge E of the bottom surface and the position of a reflected image E' of the outer circumferential edge, determining the position of the position reference part from the position of the circumferential edge of the base of the column, and determining the position of the given point using the position of the position reference part as a reference.

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Inventors:
FUJIOKA TAKAHIRO (JP)
HORIKIRI HIRONORI (JP)
IKEDA KATSUMOTO (JP)
Application Number:
PCT/JP2017/017867
Publication Date:
November 15, 2018
Filing Date:
May 11, 2017
Export Citation:
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Assignee:
NALUX CO LTD (JP)
International Classes:
G01B11/00
Foreign References:
JP2009145656A2009-07-02
JP2014137410A2014-07-28
JP2008216905A2008-09-18
US20140294354A12014-10-02
JP2007317845A2007-12-06
Attorney, Agent or Firm:
FUSHIMI, Naoya (JP)
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