POSITION MEASURING DEVICE AND POSITION MEASURING METHOD, MOBILE BODY DRIVING SYSTEM AND MOBILE BODY DRIVING METHOD, PATTERN FORMING DEVICE AND PATTERN FORMING METHOD, EXPOSURE DEVICE AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Title:

Document Type and Number:

WIPO Patent Application WO/2007/097350

Kind Code:

A1

Abstract:

A position measuring device includes linear encoders (50A to 50D) having four movable scales (44A to 44D) which are secured to a wafer stage (WST) and surround a wafer (W); and head units (46A to 46D) which are corresponding to the movable scales and emit a light having a wavelength in the longitudinal direction substantially longer than that in the direction perpendicular to the longitudinal direction. The information on the position of the wafer stage (WST) in an XY plane is calculated on the basis of the results of measured by the encoders. Thereby, the position of a mobile body can be accurately measured without increasing the size.

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JPS57152128	ELECTRON BEAM DRAWING DEVICE
JPS62269267	DRAWING DATA PREPARING DEVICE

Inventors:

MAKINOUCHI SUSUMU (JP)
IMAI TORU (JP)
WATANABE AKIHIRO (JP)

Application Number:

PCT/JP2007/053140

Publication Date:

August 30, 2007

Filing Date:

February 21, 2007

Export Citation:

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Assignee:

NIKON CORP (JP)
SENDAI NIKON CORP (JP)
MAKINOUCHI SUSUMU (JP)
IMAI TORU (JP)
WATANABE AKIHIRO (JP)

International Classes:

H01L21/027; G01B11/00; G03F7/20

Foreign References:

JPH07270122A	1995-10-20
JPS61223603A	1986-10-04
JPH01291101A	1989-11-22
JPS6033013A	1985-02-20
JPS54151265U	1979-10-20

Attorney, Agent or Firm:

TATEISHI, Atsuji (Karakida Center Bldg. 1-53-9, Karakida, Tama-sh, Tokyo 35, JP)

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