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Patent Searching and Data


Title:
POSITIONING CONTROL SYSTEM
Document Type and Number:
WIPO Patent Application WO/2014/115263
Kind Code:
A1
Abstract:
The present invention is provided with the following: moving devices (120, 130) for moving a top table (110); position detection devices (112, 125) for detecting the position of the top table (110); a measurement device (144) that measures the control characteristics of a control system of the moving devices (120, 130) at a plurality of positions; an adjustment value computing unit (145) that computes an adjustment value for adjusting the control parameters of the control system of the moving devices (120, 130) on the basis of the plurality of measurement results obtained from the measurement device (144); and a control parameter adjustment unit (146) that performs control on the basis of the control parameters and the detection results from the position detection devices (112, 125) so that the top table (110) will move to a predetermined target position, and that adjusts the control parameters on the basis of the adjustment value computed by the adjustment value computing unit (145). Due to the foregoing, the present invention provides a positioning control system that is highly robust in relation to the positional dependency of control objects in the entire movable range, and to the mechanical differences for each device.

Inventors:
ODAI MASAKI (JP)
OGAWA HIRONORI (JP)
TAKAGI TOYOKAZU (JP)
TAKANO ERII (JP)
TAKAHIRA ISAO (JP)
Application Number:
PCT/JP2013/051288
Publication Date:
July 31, 2014
Filing Date:
January 23, 2013
Export Citation:
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Assignee:
HITACHI LTD (JP)
International Classes:
G05D3/12
Foreign References:
JP2009122779A2009-06-04
JPH08194503A1996-07-30
JP2010257314A2010-11-11
Attorney, Agent or Firm:
KASUGA Yuzuru (JP)
Kasuga 讓 (JP)
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