Title:
POSITIONING DEVICE, DRIVING UNIT, AND ALIGNER EQUIPPED WITH THE DEVICE
Document Type and Number:
WIPO Patent Application WO/1999/010970
Kind Code:
A1
Abstract:
A device for positioning a movable body (6) (an object) on which a wafer W is mounted. The device is provided with a magnetism generating unit (8) incorporated in the movable body (6), magnetic members (10, 15A, 15B, 16) which hold the magnetism generating unit (8) between them, and a driving unit (11) which is provided between the magnetism generating unit (8) and the magnetic members (10, etc.) and drives the magnetism generating unit (8). The movable unit (6) is positioned by the magnetic members (10, etc.) and the driving unit (11). The positioning device permits the movable unit (an object) to be positioned quickly and highly accurately and to be used preferably in, for instance, and aligner in which a wafer is positioned highly accurately.
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Inventors:
ONO KAZUYA (JP)
Application Number:
PCT/JP1998/003688
Publication Date:
March 04, 1999
Filing Date:
August 20, 1998
Export Citation:
Assignee:
NIKON CORP (JP)
ONO KAZUYA (JP)
ONO KAZUYA (JP)
International Classes:
G03F7/20; H01L21/68; H01L21/687; H02K41/03; H02K41/035; H02N15/00; H02K7/09; (IPC1-7): H02K41/03
Foreign References:
JPH04292328A | 1992-10-16 | |||
JPH0522924A | 1993-01-29 | |||
JPH0748028A | 1995-02-21 | |||
JPS63148855A | 1988-06-21 | |||
JPH04351979A | 1992-12-07 | |||
JPS6142268A | 1986-02-28 | |||
JPH03230746A | 1991-10-14 | |||
JPH06254734A | 1994-09-13 |
Other References:
See also references of EP 1017155A4
Attorney, Agent or Firm:
Shiga, Masatake (Takadanobaba 3-chome Shinjuku-ku Tokyo, JP)
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