Title:
POSITIVE-DISPLACEMENT VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO2004083643
Kind Code:
B1
Abstract:
The present invention relates to a positive-displacement vacuum pump for evacuating a gas by rotating two rotors synchronously in opposite directions in a non-contact manner. A positive-displacement vacuum pump according to the present invention includes two rotational shafts (11a, 11b) which are synchronously rotatable in opposite directions, a pair of multistage rotors (12, 12) provided on the rotational shafts (11a, 11b), respectively, a rotor casing (14) for housing the pair of multistage rotors (12, 12), a plurality of bearings (21) for rotatably supporting the rotational shafts (11a, 11b), a bearing casing (23) for housing the bearings (21), a cooling mechanism (25) for cooling the bearing casing (23), and a seal member (27) disposed near the bearings (21). The bearings (21) and the seal member (27) are cooled by the cooling mechanism (25).
Inventors:
KAWAMURA TAKESHI (JP)
FURUTA HIROKI (JP)
SHIOKAWA ATSUSHI (JP)
YANAGISAWA KIYOSHI (JP)
FURUTA HIROKI (JP)
SHIOKAWA ATSUSHI (JP)
YANAGISAWA KIYOSHI (JP)
Application Number:
PCT/JP2004/003705
Publication Date:
April 07, 2005
Filing Date:
March 18, 2004
Export Citation:
Assignee:
EBARA CORP (JP)
KAWAMURA TAKESHI (JP)
FURUTA HIROKI (JP)
SHIOKAWA ATSUSHI (JP)
YANAGISAWA KIYOSHI (JP)
KAWAMURA TAKESHI (JP)
FURUTA HIROKI (JP)
SHIOKAWA ATSUSHI (JP)
YANAGISAWA KIYOSHI (JP)
International Classes:
F04C18/12; F04C23/00; F04C29/04; (IPC1-7): F04C29/04
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