Title:
POSITIVE AND NEGATIVE PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO2006026081
Kind Code:
A3
Abstract:
A device for sensing pressure using two perforated rigid films in which a diaphragm is mounted between the first two films. The device senses positive and negative pressure through a port or opening to the region for which pressure data is desired. The device communicates capacitive pressure and changes in that pressure. The flexible diaphragm is spaced from the first and second films such that the flexible diaphragm is adapted to flex toward the first film when pressure increases in the opening and is adapted to flex toward the second film when pressure decreases in the opening to change the capacitance between the diaphragm and at least one of the first and second films. Spacers are used to position all three elements.
Inventors:
TZU-YU WANG (US)
CABUZ EUGEN I (US)
CABUZ EUGEN I (US)
Application Number:
PCT/US2005/028126
Publication Date:
June 01, 2006
Filing Date:
August 09, 2005
Export Citation:
Assignee:
HONEYWELL INT INC (US)
TZU-YU WANG (US)
CABUZ EUGEN I (US)
TZU-YU WANG (US)
CABUZ EUGEN I (US)
International Classes:
G01L9/12; G01L7/08; G01L9/00
Foreign References:
| US6901807B1 | 2005-06-07 | |||
| US6886410B1 | 2005-05-03 | |||
| EP0727650A2 | 1996-08-21 | |||
| US3195028A | 1965-07-13 | |||
| US3703828A | 1972-11-28 |
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