Title:
POSITIVE PHOTOSENSITIVE RESIN COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2016/010124
Kind Code:
A1
Abstract:
Provided is a positive photosensitive resin composition, a film of which after heating and firing generates less outgas. A positive photosensitive resin composition which contains a polyalkenyl phenol resin having a structure represented by formula (1), an alkali-soluble resin (excluding a polyalkenyl phenol resin having a structure represented by formula (1)), and a quinonediazide compound.
(In formula (1), each of R1, R2 and R3 independently represents a hydrogen atom, an alkyl group having 1-5 carbon atoms, an alkenyl group represented by formula (2), an alkoxy group having 1-2 carbon atoms or a hydroxyl group, and at least one of the R1, R2 and R3 moieties represents an alkenyl group represented by formula (2); and each Q independently represents an alkylene group represented by formula -CR4R5-, a cycloalkylene group having 5-10 carbon atoms, a divalent organic group having an aromatic ring, a divalent organic group having an alicyclic fused ring or a divalent group obtained by combining the preceding groups.)
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Inventors:
FURUE KENTARO (JP)
ONO YUKI (JP)
ONO YUKI (JP)
Application Number:
PCT/JP2015/070443
Publication Date:
January 21, 2016
Filing Date:
July 16, 2015
Export Citation:
Assignee:
SHOWA DENKO KK (JP)
International Classes:
G03F7/023; C08G8/30; G03F7/40; H01L51/50; H05B33/10; H05B33/22
Foreign References:
JP2006133585A | 2006-05-25 | |||
JPS62260145A | 1987-11-12 | |||
JPS62260147A | 1987-11-12 | |||
JPH05232696A | 1993-09-10 | |||
JPH05134411A | 1993-05-28 | |||
JP2013130816A | 2013-07-04 | |||
JP2013015701A | 2013-01-24 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
Aoki 篤 (JP)
Aoki 篤 (JP)
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