Title:
POST-TREATMENT METHOD FOR PYROELECTRIC RELAXOR FERROELECTRIC SINGLE CRYSTAL
Document Type and Number:
WIPO Patent Application WO/2015/172589
Kind Code:
A1
Abstract:
A post-treatment method for a pyroelectric relaxor ferroelectric single crystal, sequentially comprising grinding and chemical mechanical polishing being successively carried out on a first surface of a single crystal, grinding and chemical mechanical polishing being successively carried out on a second surface opposite the first surface, wet etching being performed on the single crystal, and annealing treatment being carried out on the wet-etched single crystal. Defects and surface stress produced in grinding steps of the single crystal are removed, dielectric loss and dielectric noise of the single crystal are reduced, and the detection performance of a pyroelectric relaxor ferroelectric single crystal detector is improved.
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Inventors:
LUO HAOSU (CN)
LI LONG (CN)
ZHAO XIANGYONG (CN)
LIN DI (CN)
WANG SHENG (CN)
XU QING (CN)
YANG LINRONG (CN)
LI LONG (CN)
ZHAO XIANGYONG (CN)
LIN DI (CN)
WANG SHENG (CN)
XU QING (CN)
YANG LINRONG (CN)
Application Number:
PCT/CN2015/071796
Publication Date:
November 19, 2015
Filing Date:
January 29, 2015
Export Citation:
Assignee:
RES AND DEV CT SHANGHAI INST OF CERAMICS (CN)
SHANGHAI INST CERAMICS (CN)
SHANGHAI INST CERAMICS (CN)
International Classes:
H01L41/187; C30B29/32; H01L21/324; H01L21/477
Foreign References:
| CN1062889A | 1992-07-22 | |||
| CN102928089A | 2013-02-13 | |||
| US20050090378A1 | 2005-04-28 | |||
| CN101985775A | 2011-03-16 | |||
| CN103943771A | 2014-07-23 |
Attorney, Agent or Firm:
HANHONG LAW FIRM (CN)
上海翰鸿律师事务所 (CN)
上海翰鸿律师事务所 (CN)
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