Title:
POWDER CARTRIDGE AND POWDER SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2020/235379
Kind Code:
A1
Abstract:
A powder cartridge according to an embodiment of the present disclosure is a powder cartridge that supplies powder to a feeder, the powder cartridge being provided with: a housing that is attachable to and detachable from the feeder and has a first room that is capable of accommodating the powder in an airtight state and a second room that is capable of communicating with the first room and provided with at least any of a gas supply port and a gas discharge port; and an opening/closing part that controls a communication state between the first room and the second room.
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Inventors:
KAJI KIMITOMO (JP)
YOSHII NAOKI (JP)
KADOSAWA KATSUJI (JP)
YOSHII NAOKI (JP)
KADOSAWA KATSUJI (JP)
Application Number:
PCT/JP2020/018850
Publication Date:
November 26, 2020
Filing Date:
May 11, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B65D83/06; B05B7/20; C23C4/12; H01M4/40
Domestic Patent References:
| WO2018105700A1 | 2018-06-14 |
Foreign References:
| JP2014176820A | 2014-09-25 | |||
| JPS56141767U | 1981-10-26 | |||
| JPH10113928A | 1998-05-06 | |||
| JPS63114990U | 1988-07-25 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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