Title:
POWDER CONVEYANCE DEVICE, GAS SUPPLY DEVICE, AND POWDER REMOVAL METHOD
Document Type and Number:
WIPO Patent Application WO/2022/071030
Kind Code:
A1
Abstract:
Provided are a powder conveyance device that suppresses internal leakage, a gas supply device, and a powder removal method. The powder conveyance device comprises: powder conveyance piping that forms a connection from a powder material supply source to a vaporizer; a first valve that is installed on the powder material supply source side of the powder conveyance piping; a second valve that is installed on the vaporizer side of the powder conveyance piping; a buffer tank that is filled with a purge gas; first purge gas supply piping that is connected to the powder conveyance piping upstream of the second valve and that supplies the purge gas from the buffer tank to the second valve; a first purge gas valve that is installed in the first purge gas supply piping; and a control unit that controls the opening and closing of the first valve, the second valve, and the first purge gas valve.
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Inventors:
KOMORI EIICHI (JP)
Application Number:
PCT/JP2021/034619
Publication Date:
April 07, 2022
Filing Date:
September 21, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B65G53/66
Domestic Patent References:
| WO2010007981A1 | 2010-01-21 |
Foreign References:
| JP2008251905A | 2008-10-16 | |||
| JP2019052346A | 2019-04-04 | |||
| CN209178332U | 2019-07-30 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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