Title:
POWER INPUT DEVICE AND VACUUM PROCESSING APPARATUS USING POWER INPUT DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/011149
Kind Code:
A1
Abstract:
Disclosed is a power input mechanism which comprises: a first fixed conductive member; a second fixed conductive member; a fixed insulating member that is affixed to a case and insulates between the first fixed conductive member and the second fixed conductive member; a first rotary conductive member; a second rotary conductive member; a rotary insulating member that is affixed to a supporting column and insulates between the first rotary conductive member and the second rotary conductive member; a first power input member that supplies a first voltage to a substrate holder via the first rotary conductive member and the first fixed conductive member; and a second power input member that supplies a second voltage to the substrate holder via the second rotary conductive member and the second fixed conductive member.
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Inventors:
SUGI, Kyosuke (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
Application Number:
JP2010/004676
Publication Date:
January 26, 2012
Filing Date:
July 21, 2010
Export Citation:
Assignee:
CANON ANELVA CORPORATION (2-5-1, Kurigi Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２－５－１ Kanagawa, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２－５－１ Kanagawa, 〒2158550, JP)
International Classes:
H01L21/683
Attorney, Agent or Firm:
OHTSUKA, Yasunori (7th Fl, Kioicho Park Bldg. 3-6, Kioicho, Chiyoda-k, Tokyo 94, 〒1020094, JP)
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Claims:
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